Mass Flow / Pressure Controllers with shut-off valves
FLEXI-FLOW Compact models FF-C10S and FF-C11S Mass Flow / Pressure Controllers with integrated shut-off valves. They are suited for accurate measurement and control of flow ranges between 0…500 mln/min and 0…20 ln/min at operating pressures between 0,8 and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique, internationally patented TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion. The multi-parameter instruments provide the user with useful process information.
FF-C1x Mass Flow / Pressure Controllers with shut-off valve are Built-to-Order (BtO) and currently available in 2 variants:
- Type FF-C10S: flow + temperature
- Type FF-C11S: flow + temperature + up- and downstream pressure