1. How does a mass flow controller work?
A mass flow controller is a compact device that supplies one or more chemical compounds – gas or liquid - to a process by accurately controlling the flow rate. To this end, the flow rate of the compound(s) to be supplied is set electronically by a voltage, current or digital (fieldbus) source. The amount of gas or liquid that flows through the device is measured by an internal sensor. This measurement value is compared with the setpoint value. To achieve that both values are equal, a control valve will vary the size of the flow passage (by opening or closing).
In the basics, a mass flow controller is a mass flow meter (i.e. the sensor) combined with control valve and feedback electronics between sensor and valve. This control function (also known as PID, proportional-integral-derivative) is often a standard part of the device electronics, whereas the control characteristics can be adjusted for fast or smooth control by means of user software.