How is the gas flow controlled?
For these applications Bronkhorst offers mass flow controllers, based on reliable and accurate capillary bypass technology and valve technology. This allows you to achieve a dynamic flow range of up to 1 : 1000, providing the low and high flow rates required for the growth process.
Mass flow controllers using capillary bypass technology, have a tube-shaped flow sensor inside that is positioned parallel – in bypass – with the main flow path. There is a split of gas flow into the flow sensor and the main flow path. This technology enables reliable and accurate flow measurement and control for all gases involved.