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FLEXI-FLOW™ 緊湊型氣體質量流量計和控制器

質量流量和壓力測量與控制的新標杆

新的 FLEXI-FLOW Compact 系列將快速穩定的芯片傳感器與可靠準確的旁路技術相結合。 緊湊、創新的儀器是質量流量測量和控制的巨大飛躍:質量流量控制 #重新定義

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質量流量控制 #重新定義

  • 多參數測量:流量、溫度和壓力在一台儀器中
  • 通過藍牙和App進行簡單安全的連接
  • 通過内建氣體數據庫和實時轉換實現卓越的準確性
  • NAMUR 狀態指示讓您隨時了解您的製程
  • 大動態範圍的測量和控制適應多種應用

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FLEXI-FLOW Compact 系列包括 3 種型號:

  • “預配置高端型 (PA)”,MFC 有 8 個範圍 (FS):5/20/50/200 mln/min + 0,5/2/5/20 ln/min(基於 N2),量程比 1:500,流量 + 溫度 + 壓力
  • “預配置標準型 (PS)”,MFC 有 4 個範圍 (FS):0,5/2/5/20 ln/min(基於 N2),量程比 1:50,流量 + 溫度
  • “按訂單製造 (BtO)”、MFC 和 MFM,可在 0.005 和 20 ln/min 之間自由選擇範圍(FS,基於 N2),調節比 1:1000; 包括最多 8 個通道的多通道版本

Quick link to Mass Flow Meter/Controller model pages

Full Scale capacities (based on N) and pressure rating

Mass Flow Controller Mass Flow Meter
PN 16 bar PN 16 bar
FF-C00/FF-C01 MFC  |  5 ... 200 mln/min FF-M00/FF-M01 MFM  |  5 ... 200 mln/min
FF-C10/FF-C11 MFC  |  0,5 ... 20 ln/min FF-M10/FF-M11 MFM  |  0,5 ... 20 ln/min
FF-C10D/FF-C11D MFC  |  0,5 ... 20 ln/min (downported) FF-M10D/FF-M11D MFM  |  0,5 ... 20 ln/min (downported)
FF-C10S/FF-C11S MFC  |  0,5 ... 20 ln/min (with shut-off)  
FF-Axxx MFC  |  0,005 ... 20 ln/min (Preconfigured Advanced)  
FF-Sxxx MFC  |  0,5 ... 20 ln/min (Preconfigured Standard)  


Flow factor and conversion

​To determine which model is suitable for process gases other than N2, the Full Scale (FS) flow must be multiplied by the below-mentioned 'flow factor'. Note: This factor may be different for a flow meter or a flow controller.
The high-accuracy on-board FLUIDAT gas database ensures best in class conversion from N2 to the customer gas. When converting one gas to another, a small uncertainty is introduced. Although gas properties and conversion model are very accurate, mechanical tolerances may cause slight deviations from the theoretical conversion values. Therefore and additional uncertainty [%Rd] is applied to the accuracy specification. When the best accuracy performance is required, calibration on actual process gas can be performed.

Download this table with visualisation of the flow range for each gas

 
Name Gas formula Flow factor MFM Flow factor MFC Conversion uncertainty Remarks
Acetylene C2H2 0,6 0,6 ±1,5% Rd  
Air Air 1 1 none  
Allene C3H4 #1 0,4 0,4 ±1,5% Rd  
Argon Ar 1,3 0,8 ±1,5% Rd  
Carbon dioxide CO2 0,7 0,7 ±1,5% Rd max. 10 bar
Carbon monoxide CO 1 1 ±1,5% Rd  
Cyclopropane C3H6 #1 0,4 0,4 ±1,5% Rd  
Deuterium D2 #1 1 1 ±1,5% Rd  
Ethane C2H6 0,5 0,5 ±1,5% Rd  
Ethylene C2H4 0,6 0,6 ±1,5% Rd max. 10 bar
Helium He 1,4 1,4 ±1,5% Rd  
Hydrogen H2 1 1 ±1,5% Rd  
Krypton Kr 1 0,6 ±1,5% Rd  
Methane CH4 0,8 0,8 ±1,5% Rd  
Neon Ne 1,4 1,2 ±1,5% Rd  
Nitrogen N2 1 1 none  
Nitrous oxide N2O 0,7 0,7 ±1,5% Rd  
Oxygen O2 1 0,9 none  
Perfluoropropane C3F8 0,15 0,15 ±1,5% Rd max. 10 bar
Propylene C3H6 #2 0,4 0,4 ±1,5% Rd max. 10 bar
Propane C3H8 0,3 0,3 ±1,5% Rd  
Propyne C3H4 #2 0,4 0,4 ±1,5% Rd  

Downloads

Brochures
FLEXI-FLOW Compact brochure
FLEXI-FLOW Compact datasheet Advanced Functionalities
Manuals
Manual FLEXI-FLOW Compact
Quick Start Guide FLEXI-FLOW Compact
Quick Start Guide FLEXI-FLOW Compact with shut-off valve
Mounting Instruction Compression Fittings RS
Mounting Instruction Compression Fittings ISO
Mounting Instruction Push-in Fittings
Hook-up diagrams
FLEXI-FLOW Compact Ethernet
FLEXI-FLOW Compact Modbus-RTU/FLOW-BUS
FLEXI-FLOW Compact with shut-off valve Modbus-RTU / FLOW-BUS
FLEXI-FLOW Compact with shut-off valve Ethernet

Application stories

The FLEXI-FLOW Compact series can be used in multiple applications, especially in applications with benchtop bioreactors, analytical equipment and vacuum deposition processes. Read the application stories:


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