Mass Flow/Pressure Meter for Low Gas Flows
FLEXI-FLOW Compact models FF-M10 and FF-M11 Compact Mass Flow / Pressure Meters are suited for accurate measurement of flow ranges between 0…500 mln/min and 0…20 ln/min at operating pressures between vacuum and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique, internationally patented TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion. The multi-parameter instruments provide the user with useful process information:
- Model FF-M10: flow + temperature
- Model FF-M11: flow + temperature + up- and downstream pressure