FF-Axxx

Preconfigured Advanced (PA) Mass Flow / Pressure Controllers

FLEXI-FLOW Compact Preconfigured Advanced (PA) Mass Flow / Pressure Controllers are suited for accurate measurement and control of flow ranges between 0…5 ml_n/min and 0…20 l_n/min at operating pressures between vacuum and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique, internationally patented TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion. The multi-parameter instruments provide the user with useful process information.

FLEXI-FLOW Compact Preconfigured Advanced' (PA) models feature a turndown of 1:500, flow control and output of temperature, upstream pressure and downstream pressure. They are available in 4 flow ranges (FS, based on N₂):

Type FF-A005 - 5 ml_n/min
Type FF-A020 - 20 ml_n/min
Type FF-A050 - 50 ml_n/min
Type FF-A200 - 200 ml_n/min
Type FF-A500 - 500 ml_n/min
Type FF-A2K0 - 2 l_n/min
Type FF-A5K0 - 5 l_n/min
Type FF-A20K - 20 l_n/min

기술 정보

Measurement / control system
Flow range (intermediate ranges available)	min. 0…5 ml_n/min max. 0…20 l_n/min (based on N₂)





Pressure ranges	0...17 bar(a)



정확도 (선형도) (실제 검교정 기반)	±0,8% Rd plus ±0,2% FS (N₂/Air/O₂) for other gases add conversion uncertainty; see multi gas table;




Repeatability	Flow sensor: < ±0,2% Rd; Pressure sensors: < ±0,2% FS
Turndown ratio	up to 1:500


Max. operating pressure	16 bar(g)










Multi Gas/Multi Range	embedded gas data for 22 unique gases plus any mixture of these gases




Settling time (in control, typical)	< 150 ms
Long term stability	< 0,5% FS over period of 3 years; then < 0,2% FS per year


Control stability	< ± 0,1% FS (typical for 1 l_n/min N₂₎


Operating temperature	0 … 50 °C
Storage / Transport conditions	-20 … +50 °C, max. 95% RH (non-condensing)

Mounting	any position, attitude sensitivity negligible
Temperature sensitivity	Flow sensor: zero 0,015% FS/ºC; span 0,05% Rd/ºC; Pressure sensors: zero 0,16 mbar/ºC; span 0,05% Rd/ºC
Temperature accuracy	± 0,2 ºC (instrument body temperature)
Accuracy pressure sensors	±0,5% FS






Pressure sensitivity	standard: < 0,15% Rd/bar typical N₂; with pressure correction: typical factor 5 improved



Leak integrity, outboard	tested < 2 x 10^-9 mbar l/s He
Leak-by through closed valve	typical < 1 x 10^-4 mbar·l/s He

Mechanical parts

Instrument body	Aluminium





Material (wetted parts)	aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass
Surface quality	< 1,6 mu Ra

Pressure rating (PN)	16 bar(g) / 250 psig



Max. ΔP	16 bar(d); 20 ln/min models: 5 bar (d)

Process connections	BSPP female thread (ISO1179-1); couplings to be ordered separately

Seals	FKM 51415; valve seat: FFKM with PI film
Weight	200 g
Ingress protection	IP40

Electrical properties

Power supply	24 Vdc ± 10%


Max. power consumption	2,5 Watt (typical, in control)















Digital communication	Modbus RTU or FLOW-BUS (selectable) Optional: PROFINET, EtherCAT, Modbus-TCP, Ethernet/IP or POWERLINK







Support interface	USB-C port for easy setup; Optional Bluetooth connection for monitoring


Electrical connection	9-pin D-sub (male)
Certification	CE / UKCA / KC

Electrical connection

Control valve options

External actuator options to be connected to the controller

Certification for hazardous areas

Approvals / certificates

Downloads

Brochures
FLEXI-FLOW Compact brochure

Manuals
Manual FLEXI-FLOW Compact
Quick Start Guide FLEXI-FLOW Compact
Mounting Instruction Compression Fittings RS
Mounting Instruction Compression Fittings ISO
Mounting Instruction Push-in Fittings

Hook-up diagrams
FLEXI-FLOW Compact Modbus-RTU / FLOW-BUS
FLEXI-FLOW Compact Ethernet

Dimensional drawings
Dimensional drawing FF-Axxx

Solids 3D
FLEXI-FLOW Compact <20 ln/min - Standard
FLEXI-FLOW Compact <20 ln/min - Ethernet

FLEXI-FLOW Compact FF-Axxx

Preconfigured Advanced (PA) Mass Flow / Pressure Controllers

기술 정보

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