FF-Sxxx

Preconfigured Standard (PS) Mass Flow Controllers

FLEXI-FLOW Compact Preconfigured Standard (PS) Mass Flow Controllers are suited for accurate measurement and control of flow ranges between 0…500 ml_n/min and 0…20 l_n/min at operating pressures between 0,8 and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique, internationally patented TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion. The multi-parameter instruments provide the user with useful process information.

FLEXI-FLOW Compact Preconfigured Standard (PS) Mass Flow Controllers feature a turndown of 1:50, flow control + temperature output). They are available in 4 flow ranges (FS, based on N₂):

Type FF-S500 - 500 ml_n/min
Type FF-S2K0 - 2 l_n/min
Type FF-S5K0 - 5 l_n/min
Type FF-S20K - 20 l_n/min

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)	min. 0…500 ml_n/min max. 0…20 l_n/min (based on N₂)









Accuracy (incl. linearity) (based on actual calibration)	±1,5% Rd plus ±0,5% FS (N₂/Air/O₂) for other gases add conversion uncertainty; see multi gas table;




Repeatability	≤ ± 0,2% Rd
Turndown ratio	1:50


Max. operating pressure	16 bar(g)










Multi Gas/Multi Range	embedded gas data for 22 unique gases plus any mixture of these gases




Settling time (in control, typical)	< 150 ms
Long term stability	< 0,5% FS over period of 3 years; then < 0,2% FS per year


Control stability	< ± 0,1% FS (typical for 1 l_n/min N₂₎


Operating temperature	0 … 50 °C
Storage / Transport conditions	-20 … +50 °C, max. 95% RH (non-condensing)

Mounting	any position, attitude sensitivity negligible
Temperature sensitivity	zero 0,015% FS/ºC; span 0,05% Rd/ºC
Temperature accuracy	± 0,2 ºC (instrument body temperature)







Pressure sensitivity	standard: < 0,15% Rd/bar typical N₂



Leak integrity, outboard	tested < 2 x 10^-9 mbar l/s He
Leak-by through closed valve	typical < 1 x 10^-4 mbar·l/s He

Mechanical parts

Instrument body	Aluminium





Material (wetted parts)	aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass
Surface quality	< 1,6 mu Ra

Pressure rating (PN)	16 bar(g) / 250 psig 16 bar(g) / 250 psig



Max. ΔP	16 bar(d); 20 ln/min models: 5 bar (d)

Process connections	BSPP female thread (ISO1179-1); couplings to be ordered separately

Seals	FKM 51415; valve seat: FFKM with PI film
Weight	200 g
Ingress protection	IP40

Electrical properties

Power supply	24 Vdc ± 10%


Max. power consumption	2,5 Watt (typical, in control)















Digital communication	Modbus RTU or FLOW-BUS (selectable)







Support interface	USB-C port for easy setup; Optional Bluetooth connection for monitoring


Electrical connection	9-pin D-sub (male)
Certification	CE / UKCA / KC

Electrical connection

Control valve options

External actuator options to be connected to the controller

Certification for hazardous areas

Approvals / certificates

ダウンロード

カタログ
FLEXI-FLOW カタログ

取扱説明書
FLEXI-FLOW 取扱説明書
FLEXI-FLOW 簡易操作手引き
継手取付要領（食い込み継手）RS
継手取付要領（プッシュイン継手）
継手取付要領（食い込み継手）ISO

配線図
FLEXI-FLOW Compact Modbus-RTU / FLOW-BUS

外形寸法図
Dimensional drawing FF-Sxxx

3D CAD図
FLEXI-FLOW コンパクトMFM/MFC

FLEXI-FLOW Compact FF-Sxxx

Preconfigured Standard (PS) Mass Flow Controllers

Technical specifications

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