Bronkhorst

FLEXI-FLOW Compact FF-C0x

マスフロー・圧力コントローラ(受注生産)

  • 高速・安定した制御
  • オンボードガスコンバージョンモデル
  • 22種のガスデータ搭載
  • マルチパラメータ出力:マスフロー、温度、圧力
  • USB-C, Bluetooth通信対応
  • Namur NE107情報
お見積り依頼 Downloads Datasheet
FLEXI-FLOW CompactFF-C0x

Mass Flow / Pressure Controllers for Low Gas Flows

FLEXI-FLOW Compact models FF-C00 and FF-C01 Mass Flow / Pressure Controllers are suited for accurate measurement and control of flow ranges between 0…5 mln/min and 0…200 mln/min at operating pressures between 0,8 and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique, internationally patented TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion. The multi-parameter instruments provide the user with useful process information. 

FF-C0x Mass Flow / Pressure Controllers are Built-to-Order (BtO) and feature a turndown of 1:1000 and a free selection of ranges between 5 and 200 mln/min (FS, based on N2). They are currently available in 2 variants:

  • Type FF-C00: flow + temperature
  • Type FF-C01: flow + temperature + up- and downstream pressure
These instruments may also be used to configure multi-channel versions up to 8 channels.

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0…5 mln/min
max. 0…200 mln/min
(based on N2)
Pressure rangesFF-C00: not available / FF-C01: 0...17 bar(a)
Accuracy (incl. linearity) (based on actual calibration)Up to ±0,5% Rd plus ±0,1% FS (N2/Air/O2)
for other gases add conversion uncertainty; see multi gas table;
RepeatabilityFlow sensor: < ±0,2% Rd;
Pressure sensors: < ±0,2% FS
Turndown ratioup to 1:1000;
≤ 20 mln/min: up to 1:500
Max. operating pressure16 bar(g)
Multi Gas/Multi Rangeembedded gas data for 22 unique gases plus any mixture of these gases
Settling time (in control, typical)< 150 ms
Long term stability< 0,5% FS over period of 3 years; then < 0,2% FS per year
Control stability< ± 0,1% FS (typical for 1 ln/min N2)
Operating temperature0 … 50 °C
Storage / Transport conditions-20 … +80 °C, max. 95% RH (non-condensing)
Mountingany position, attitude sensitivity negligible
Temperature sensitivityFlow sensor: zero 0,015% FS/ºC; span 0,05% Rd/ºC;
Pressure sensors: zero 0,16 mbar/ºC; span 0,05% Rd/ºC
Temperature accuracy± 0,2 ºC (instrument body temperature)
Accuracy pressure sensors±0,5% FS
Pressure sensitivitystandard: < 0,15% Rd/bar typical N2;
with pressure correction: typical factor 5 improved
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Leak-by through closed valvetypical < 1 x 10-4 mbar·l/s He; < 5 x 10-5 mbar·l/s He for FS flow rates ≤ 50 mln/min
Mechanical parts
Instrument bodyAluminium or Stainless steel (selectable)
Material (wetted parts)aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass
Surface quality< 1,6 mu Ra
Pressure rating (PN)16 bar(g) / 250 psig
Max. ΔP16 bar(d);
20 ln/min models: 5 bar (d)
Process connections1/8" BSPP female thread; couplings to be ordered separately
SealsFKM 51415; valve seat: FFKM with PI film
for other materials contact factory
Weight225 g with Aluminium body, 325 g with SS 316 body;
add 50 g for Ethernet interface
Ingress protectionIP40
Electrical properties
Power supply24 Vdc ± 10%
Max. power consumption2,5 Watt (typical, in control);
add 0,9 Watt for EtherNet communication
Digital communicationModbus RTU or FLOW-BUS (selectable)
Optional: PROFINET, EtherCAT, Modbus-TCP, Ethernet/IP or POWERLINK
Support interfaceUSB-C port for easy setup;
Optional Bluetooth connection for monitoring
Electrical connection9-pin D-sub (male)
CertificationCE / UKCA / KC
Electrical connection
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

ダウンロード

カタログ
FLEXI-FLOW カタログ
取扱説明書
FLEXI-FLOW 取扱説明書
FLEXI-FLOW 簡易操作手引き
継手取付要領(食い込み継手)RS
継手取付要領(プッシュイン継手)
継手取付要領(食い込み継手)ISO
配線図
FLEXI-FLOW Compact Modbus-RTU / FLOW-BUS
FLEXI-FLOW Compact Ethernet
外形寸法図
Dimensional drawing FF-C0x
3D CAD図
FLEXI-FLOW Compact FF-C0x - Modbus-RTU / FLOW-BUS
FLEXI-FLOW Compact FF-C0x - Ethernet


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