Bronkhorst

FLEXI-FLOW Compact FF-Axxx

構成済みマスフロー・圧力コントローラ(発展版)

  • 高速・安定した制御
  • オンボードガスコンバージョンモデル
  • 22種のガスデータ搭載
  • マルチパラメータ出力:マスフロー、温度、圧力
  • USB-C, Bluetooth通信対応
  • Namur NE107情報
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FLEXI-FLOW CompactFF-Axxx

Preconfigured Advanced (PA) Mass Flow / Pressure Controllers

FLEXI-FLOW Compact Preconfigured Advanced (PA) Mass Flow / Pressure Controllers are suited for accurate measurement and control of flow ranges between 0…5 mln/min and 0…20 ln/min at operating pressures between 0,8 and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique, internationally patented TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion. The multi-parameter instruments provide the user with useful process information. 

FLEXI-FLOW Compact Preconfigured Advanced' (PA) models feature a turndown of 1:500, flow control and output of temperature, upstream pressure and downstream pressure. They are available in 4 flow ranges (FS, based on N2):

Type FF-A005 - 5 mln/min
Type FF-A020 - 20 mln/min
Type FF-A050 - 50 mln/min
Type FF-A200 - 200 mln/min
Type FF-A500 - 500 mln/min
Type FF-A2K0 - 2 ln/min
Type FF-A5K0 - 5 ln/min
Type FF-A20K - 20 ln/min

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0…5 mln/min
max. 0…20 ln/min
(based on N2)
Pressure ranges0...17 bar(a)
Accuracy (incl. linearity) (based on actual calibration)±0,8% Rd plus ±0,2% FS (N2/Air/O2)
for other gases add conversion uncertainty; see multi gas table;
RepeatabilityFlow sensor: < ±0,2% Rd;
Pressure sensors: < ±0,2% FS
Turndown ratioup to 1:500
Max. operating pressure16 bar(g)
Multi Gas/Multi Rangeembedded gas data for 22 unique gases plus any mixture of these gases
Settling time (in control, typical)< 150 ms
Long term stability< 0,5% FS over period of 3 years; then < 0,2% FS per year
Control stability< ± 0,1% FS (typical for 1 ln/min N2)
Operating temperature0 … 50 °C
Storage / Transport conditions-20 … +50 °C, max. 95% RH (non-condensing)
Mountingany position, attitude sensitivity negligible
Temperature sensitivityFlow sensor: zero 0,015% FS/ºC; span 0,05% Rd/ºC;
Pressure sensors: zero 0,16 mbar/ºC; span 0,05% Rd/ºC
Temperature accuracy± 0,2 ºC (instrument body temperature)
Accuracy pressure sensors±0,5% FS
Pressure sensitivitystandard: < 0,15% Rd/bar typical N2;
with pressure correction: typical factor 5 improved
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Leak-by through closed valvetypical < 1 x 10-4 mbar·l/s He
Mechanical parts
Instrument bodyAluminium
Material (wetted parts)aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass
Surface quality< 1,6 mu Ra
Pressure rating (PN)16 bar(g) / 250 psig
Max. ΔP16 bar(d);
20 ln/min models: 5 bar (d)
Process connectionsBSPP female thread (ISO1179-1); couplings to be ordered separately
SealsFKM 51415; valve seat: FFKM with PI film
Weight200 g
Ingress protectionIP40
Electrical properties
Power supply24 Vdc ± 10%
Max. power consumption2,5 Watt (typical, in control)
Digital communicationModbus RTU or FLOW-BUS (selectable)
Optional: PROFINET, EtherCAT, Modbus-TCP, Ethernet/IP or POWERLINK
Support interfaceUSB-C port for easy setup;
Optional Bluetooth connection for monitoring
Electrical connection9-pin D-sub (male)
CertificationCE / UKCA / KC
Electrical connection
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

ダウンロード

カタログ
FLEXI-FLOW カタログ
取扱説明書
FLEXI-FLOW 取扱説明書
FLEXI-FLOW 簡易操作手引き
継手取付要領(食い込み継手)RS
継手取付要領(プッシュイン継手)
継手取付要領(食い込み継手)ISO
配線図
FLEXI-FLOW Compact Modbus-RTU / FLOW-BUS
FLEXI-FLOW Compact Ethernet
外形寸法図
Dimensional drawing FF-Axxx
3D CAD図
FLEXI-FLOW Compact <20 ln/min - Standard
FLEXI-FLOW Compact <20 ln/min - Ethernet


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