Mass Flow / Pressure Controllers for Low Gas Flows
FLEXI-FLOW Compact Built-to-Order (BtO) Mass Flow / Pressure Controllers are suited for accurate measurement and control of flow ranges between 0…500 mln/min and 0…20 ln/min at operating pressures between vacuum and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique, internationally patented TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion. The multi-parameter instruments provide the user with useful process information.
FLEXI-FLOW Compact Built-to-Order models feature a Mass Flow / Pressure Controllers a turndown to 1:1000; free selection of ranges between 0,5 and 20 ln/min (FS, based on N2). They are currently available in 2 variants:
- Type FF-C10: flow + temperature
- Type FF-C11: flow + temperature + up- and downstream pressure
BtO models may also be used to configure
multi-channel versions up to 8 channels.