IQ+FLOW® Ultra compact Pressure Meters / Controllers

Pressure Sensors based on MEMS Technology

Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. The size of desktop equipment, used in e.g. the analytical, biotechnology and medical markets, should be as small as possible in order to be space efficient.

In close co-operation with TNO-TPD (leading Dutch institute for applied physics) Bronkhorst has developed the IQ⁺FLOW^® mass flow sensor for gases. Additionally, miniature pressure sensors and stainless steel mini-valves were designed to fit the platform. Due to the use of micro solid state sensors (MEMS technology), IQ⁺FLOW has become a significantly miniaturized platform for low gas flow and pressure measurement and control, with a footprint of 20 x 40 mm. IQ⁺FLOW Pressure Meters and Controllers can optionally be equipped with media-isolated sensors for compatibility to a wide range of fluids.

• Lowest range 0,01...0,5 bar absolute or gauge
• Highest range 0,2...10 bar absolute or gauge

Customer specific designs

Based on the micro system technology of IQ⁺FLOW^® series, Bronkhorst also offers the possibility to combine functional modules on a compact manifold. See IQ⁺FLOW manifold solutions