EL-FLOW® Metal Sealed Mass Flow Meters / Controllers

For High Purity Gas Supply

Metal Seal Gas Mass Flow Meters and Controllers of Bronkhorst are characterised by their unique, internationally patented metal-to-metal seal construction with excellent resealing capability. Furthermore they distinguish themselves by a high surface quality and are therefore especially suitable for meeting the semiconductor and solar industry requirements as well as other high purity gas applications. The base blocks of the Mass Flow Meters and Controllers have 1/4" face seal male (VCR) connections.

Lowest range 0,12...6 ml_n/min
Highest range 1... 50 l_n/min

Metal Sealed Mass Flow Meter/Controller with fieldbus interface

Todays instruments are equipped with a digital pc-board, offering high-accuracy, excellent temperature stability and fast response (settling time t98 down to 500 msec). The latest EL-FLOW^®design features Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency. For the convenience of the customer Bronkhorst provides easy to use configuration software.

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Quick link to Mass Flow Meter/Controller model pages

Full Scale capacities (based on N₂) and pressure rating

Mass Flow Controller	Mass Flow Meter
PN 64 bar	PN 100 bar
F-201CM \| 0,006 ... 50 l_n/min	F-111CM \| 0,006 ... 50 l_n/min

Features

Resealable metal-to-metal outer seal construction (no rings)
High surface quality of wetted parts
Cleanroom assembled
Analog and digital I/O, with optionally integrated interface to CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS
High accuracy and repeatability
Stable control, even at varying process volumes

Downloads

Brochures
Metal Sealed Mass Flow and Pressure brochure

Manuals
Quick installation guide EL-FLOW Select
Manual EL-FLOW Select (incl. EL-FLOW Metal Sealed)