Mass Flow / Pressure Controllers for Low Gas Flows
FLEXI-FLOW Compact models FF-C00 and FF-C01 Mass Flow / Pressure Controllers are suited for accurate measurement and control of flow ranges between 0…5 mln/min and 0…200 mln/min at operating pressures between 0,8 and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique, internationally patented TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion. The multi-parameter instruments provide the user with useful process information.
FF-C0x Mass Flow / Pressure Controllers are Built-to-Order (BtO) and feature a turndown of 1:1000 and a free selection of ranges between 5 and 200 mln/min (FS, based on N2). They are currently available in 2 variants:
- Type FF-C00: flow + temperature
- Type FF-C01: flow + temperature + up- and downstream pressure
These instruments may also be used to configure
multi-channel versions up to 8 channels.