MASS-STREAM D-6360A MFM

Compact IP65 Mass Flow Meters for medium flow rates of gases

Bronkhorst^® models D-6360A and D-6460A Mass Flow Meters (MFMs) are suited for precise measurement of flow ranges between 1…50 ln/min and 5…500 ln/min at operating pressures between vacuum and 20 bar. The MFM consists of a proven inline thermal (CTA) mass flow sensor and a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for optional mass flow control by means of a separately mounted control valve. The instument is IP65 complient and can optionally be equipped with a modern, multi-functional and multi-colour display, with operator buttons on the instrument.

The digital MASS-STREAM™ series is characterized by a high degree of signal integrity and, as an option, up to 8 calibration curves of different gases and process conditions can be memorized in the instrument. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols.

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)	min. 1…50 l_n/min max. 5…500 l_n/min (based on N₂)









Accuracy (incl. linearity) (based on actual calibration)	± 1,0 % RD plus ± 0.5% FS (at calibration conditions)




Repeatability	< 0,2 % FS
Turndown ratio	up to 1:100
Type of gases	almost all gases, compatible with chosen materials














Response time (sensor)	approx. 0,9 sec.









Operating temperature	0 … 50 °C
Storage / Transport conditions	with display : 0 … 50 °C, max. 95% RH (non-condensing); without display : -20 … +80 °C, max. 95% RH (non-condensing)


Temperature sensitivity	D-63xx : ±0,2% Rd/°C (Air) D-64xx : ±0,1% Rd/°C (Air)








Pressure sensitivity	± 0,3% Rd/bar typical (Air)



Leak integrity, outboard	tested < 2 x 10^-8 mbar l/s He



Attitude sensitivity	at 90° deviation from horizontal max. error 0,2 % at 1 bar typical N₂
Warm-up time	30 min. for optimum accuracy, within 30 seconds for accuracy ±4% FS

Mechanical parts
Sensor	Stainless steel SS 316 (AISI 316L)
Instrument body	Stainless steel SS 316
Sieves and rings	Stainless steel SS 316







Pressure rating (PN)	20 bar g





Process connections	G1/2" (D-63xx : RP-type cavity / D-64xx : ISO1179-1 cavity) / compression type or face seal (VCR/VCO) couplings

Seals	standard: FKM/Viton®; options: EPDM, FFKM/Kalrez®
Weight	Aluminium: 1,1 kg Stainless steel: 1,6 kg
Ingress protection	IP65

Electrical properties

Power supply

+15 … 24 Vdc ±10%

Max. power consumption

Supply
15 V
24 V

Basic model
115 mA
85 mA

Add. for fieldbus
80 mA
50 mA

Add. for display
30 mA
20 mA

Analog output

0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)

Digital communication

standard: RS232
options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS

Electrical connection
Analog/RS232	8 DIN (male);



PROFIBUS DP	bus: 5-pin M12 (female); power: 8 DIN (male)
CANopen® / DeviceNet™	5-pin M12 (male)


Modbus RTU / FLOW-BUS	5-pin M12 (male)
Modbus TCP / EtherNet/IP / POWERLINK	bus: 2 x 5-pin M12 (female) (in/out); power: 8 DIN (male);



EtherCAT®/ PROFINET	bus: 2 x 5-pin M12 (female) (in/out); power: 8 DIN (male)

Control valve options

External actuator options to be connected to the controller

Certification for hazardous areas

Approvals / certificates

Downloads

Brochures
MASS-STREAM D-6300 Brochure
MASS-STREAM D-6400 Brochure

Manuals
Manual MASS-STREAM D-6300 instruments
Manual MASS-STREAM D-6300 display
Manual MASS-STREAM D-6400 instruments
Manual MASS-STREAM D-6400 display
Quick installation guide D-6400 series