MASS FLOW METERS / CONTROLLERS for gas - LOW-ΔP-FLOW series

LOW-ΔP-FLOW 質量流量計/控制器

用於低壓降或腐蝕性氣體應用

對於壓差很小的應用，Bronkhorst 開發了 LOW-ΔP-FLOW 系列質量流量計和控制器。在這些儀器中，流阻通過不同的傳感器和旁路結構被最小化。

最低範圍 0.2...10 ml_n/min
最高範圍 20...1000 m³_nh

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Quick link to Mass Flow Meter / Controller model pages

Mass Flow Meter model pages

Full Scale capacities (N₂-equivalent) versus pressure rating and Ingress Protection rating

PN 10 bar - IP40	PN 10 bar - IP65
F-100D \| 10 ... 20 ml_n/min	F-100DI \| 10 ... 20 ml_n/min
F-101D \| 0,021 ... 2,1 l_n/min	F-101DI \| 0,021 ... 2,1 l_n/min
F-101E \| 1,4 ... 12 l_n/min	F-101EI \| 1,4 ... 12 l_n/min
F-102D \| 14 ... 25 l_n/min	F-102DI \| 14 ... 25 l_n/min
F-102E \| 8,5 ... 50 l_n/min	F-102EI \| 8,5 ... 50 l_n/min
F-103D \| 40 ... 150 l_n/min	F-103DI \| 40 ... 150 l_n/min
F-103E \| 45 ... 200 l_n/min	F-103EI \| 45 ... 200 l_n/min
	F-106xD \| 10 ... 1000 m³_n/h
	F-107xD \| 10 ... 1000 m³_n/h

Mass Flow Controller model pages

Full Scale capacities versus (N₂-equivalent) pressure rating and Ingress Protection rating

PN 10 bar - IP40	PN 10 bar - IP65
F-200DV \| 10 ... 20 ml_n/min	F-200DI \| 10 ...20 ml_n/min
F-201DV \| 0,021 ... 2,1 l_n/min	F-201DI \| 0,021 ... 2,1 l_n/min
F-201EV \| 1,4 ... 12 l_n/min	F-201EI \| 1,4 ... 12 l_n/min
F-202DV \| 14 ... 25 l_n/min	F-202DI \| 14 ... 25 l_n/min
F-202EV \| 8,5 ... 50 l_n/min	F-202EI \| 8,5 ... 50 l_n/min
F-201DS \| 0,021 ... 2,1 l_n/min
F-201ES \| 1,4 ... 12 l_n/min

Features

Very low pressure drop
Longer lifetime when used on corrosive gases
Lower contamination risk
Easy to clean
Available with control valve to constitute a complete, compact control loop
Available with industrial (IP65 weatherproof) housing with optional ATEX Zone 2 Cat. 3 or FM Class I, Div. 2 approval.
Best in class mean-time-between-failure (MTBF) data based on the IEC 61508 standard

Control of mass flow with small pressure differences

The control of mass flow with small pressure difference comprises the LOW-ΔP-FLOW Mass Flow Controller in compact construction; control valve and flow meter are integrated in one body. The maximum flow in these compact models is 1...50 l_n/min Air, depending on the operating conditions. For the control of higher flow rates at very low differential pressures Bronkhorst has devised special control valves with pressure compensation bellows (types F-004AC/F-004AI/F-004BI). These control valves are piped on to the flow meter while the electronic PI-control function is an integral part of the flow meter.

"Multibus" Digital Mass Flow Meters/Controllers

Bronkhorst developed their digital instruments according to the flexible "multibus" concept, due to which the instruments can be equipped with on-board interface board with CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocol. More information about digital "multibus" communication.

Read about bypass principle

Downloads

Brochures
LOW-ΔP-FLOW Brochure

Manuals
General manual digital instruments
Operating instructions digital instruments
Quick start guide LOW-dP-FLOW lab-style
Quick start guide LOW-dP-FLOW industrial style

Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
PROFINET
CANopen
EtherNet/IP
Modbus-TCP
POWERLINK
Optional Bus and IO Configurations

Applications

Environmental air sampling at atmospheric conditions
Leak rate tests
Gas consumption measurement, for example of natural gas, in low pressure gas distribution systems
Burner control

Application story

Diamond deposition HFCVD

PN 10 bar - IP40	PN 10 bar - IP65
F-100D \| 10 ... 20 ml_n/min	F-100DI \| 10 ... 20 ml_n/min
F-101D \| 0,021 ... 2,1 l_n/min	F-101DI \| 0,021 ... 2,1 l_n/min
F-101E \| 1,4 ... 12 l_n/min	F-101EI \| 1,4 ... 12 l_n/min
F-102D \| 14 ... 25 l_n/min	F-102DI \| 14 ... 25 l_n/min
F-102E \| 8,5 ... 50 l_n/min	F-102EI \| 8,5 ... 50 l_n/min
F-103D \| 40 ... 150 l_n/min	F-103DI \| 40 ... 150 l_n/min
F-103E \| 45 ... 200 l_n/min	F-103EI \| 45 ... 200 l_n/min
	F-106xD \| 10 ... 1000 m³_n/h
	F-107xD \| 10 ... 1000 m³_n/h

PN 10 bar - IP40	PN 10 bar - IP65
F-200DV \| 10 ... 20 ml_n/min	F-200DI \| 10 ...20 ml_n/min
F-201DV \| 0,021 ... 2,1 l_n/min	F-201DI \| 0,021 ... 2,1 l_n/min
F-201EV \| 1,4 ... 12 l_n/min	F-201EI \| 1,4 ... 12 l_n/min
F-202DV \| 14 ... 25 l_n/min	F-202DI \| 14 ... 25 l_n/min
F-202EV \| 8,5 ... 50 l_n/min	F-202EI \| 8,5 ... 50 l_n/min
F-201DS \| 0,021 ... 2,1 l_n/min
F-201ES \| 1,4 ... 12 l_n/min