Bronkhorst

EL-FLOW Select F-230M

高壓氣體質量流量控制器

  • 工作壓力 / ΔP 高達 400 bar
  • 即使在可變壓力條件下也能穩定控制
  • 高準確率
  • 緊湊型設計
  • 幾乎與壓力和溫度無關
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EL-FLOW Select F-230M

Gas Mass Flow Controllers for high pressure / high delta-P

Bronkhorst® model F-230M Mass Flow Controllers (MFCs) are suited for accurate measurement and control of flow ranges between 0,2…10 mln/min and 10…500 mln/min at operating pressures up to 400 bar as well as max. 400 bar pressure difference (ΔP) . The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate.

EL-FLOW® Select series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols.


Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0,2…10 mln/min
max. 10…500 mln/min
(based on N2)
Accuracy (incl. linearity) (based on actual calibration)± 0,5 % RD plus ±0,1% FS
Repeatability< 0,2 % RD
Turndown ratio1:50
Multi fluid capabilityStorage of max. 8 calibration curves
Response time (sensor)typical 0,5 sec.
Settling time (in control, typical)2…4 seconds
Operating temperature-10 … +70 °C
Temperature sensitivityzero: < 0,05% FS/°C; span: < 0,05% Rd/°C
Pressure sensitivity< 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Attitude sensitivitymax. error at 90° off horizontal 0,2% at 1 bar, typical N2
Warm-up time30 min. for optimum accuracy
2 min. for accuracy ± 2% FS
Mechanical parts
Material (wetted parts)Stainless steel 316L or comparable
Pressure rating (PN)400 bar abs
Min. ΔP6 bar dif.
Max. ΔP400 bar dif.
Process connectionscompression type or face seal (VCR/VCO) couplings
Sealsstandard: FKM/Viton®;
options: EPDM, FFKM/Kalrez®
Weight3,4 kg
Ingress protectionIP40
Electrical properties
Power supply+15 … 24 Vdc
Max. power consumption
Supply
15 V
24 V
at voltage I/O
290 mA
200 mA
at current I/O
320 mA
215 mA
extra for fieldbus
<75 mA
<50 mA
Analog output0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationstandard: RS232;
options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, FLOW-BUS
Electrical connection
Analog/RS2329-pin D-connector (male);
PROFIBUS DPbus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
CANopen® / DeviceNet™5-pin M12-connector (male);
FLOW-BUS/Modbus-RTU/ASCIIRJ45 modular jack
Modbus TCP / EtherNet/IP / POWERLINK2 x RJ45 modular jack (in/out);
EtherCAT®/ PROFINET2 x RJ45 modular jack (in/out)
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Downloads

Brochures
EL-FLOW Select brochure
Manuals
Quick installation guide EL-FLOW Select
Manual EL-FLOW Select
Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
PROFINET
CANopen
EtherNet/IP
Modbus-TCP
POWERLINK
Optional Bus and IO Configurations
Dimensional drawings
Dimensional Drawing F-230M_F-232M_F-232M
Dimensions Digital Cases
Dimensions Adapters


台灣柏朗豪斯特股份有限公司

新竹縣竹北市台元街三十八號四樓之一、二
Rm. 1 & 2, 4F., No.38, Taiyuan St., Zhubei City, Hsinchu County 302, Taiwan (R.O.C.)
電話 +886 3-5600-518
[email protected]

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