F-201CS

Gas Mass Flow Controllers with Electrical Shut-Off Valves

Bronkhorst^® model F-201CS Mass Flow Controllers (MFCs) are suited for accurate measurement and control of flow ranges between 0,2…10 ml_n/min and 0,8…15 l_n/min at operating pressures between vacuum and 10 bar abs. The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. For extra efficiency or safety, the F-201CS features an integrated, electrically operated shut-off valve.

EL-FLOW^® Select series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols.

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)	min. 0,2…10 ml_n/min max. 0,8…15 l_n/min (based on N₂)









Accuracy (incl. linearity) (based on actual calibration)	± 0,5 % RD plus ±0,1% FS




Repeatability	< 0,2 % RD
Turndown ratio	up to 1:187,5 (1:50 in analog mode)














Multi fluid capability	Storage of max. 8 calibration curves



Settling time (in control, typical)	standard: 1…2 seconds option: down to 500 msec



Control stability	< ± 0,1 % FS (typical for 1 l_n/min N₂)


Operating temperature	-10 … +70 °C



Temperature sensitivity	zero: < 0,05% FS/°C; span: < 0,05% Rd/°C








Pressure sensitivity	< 0,1% Rd/bar typical N₂; 0,01% Rd/bar typical H₂
Max. Kv-value	6,5 x 10^-2


Leak integrity, outboard	tested < 2 x 10^-9 mbar l/s He



Attitude sensitivity	max. error at 90° off horizontal 0,2% at 1 bar, typical N₂
Warm-up time	30 min. for optimum accuracy 2 min. for accuracy ± 2% FS

Mechanical parts







Material (wetted parts)	Stainless steel 316L or comparable


Pressure rating (PN)	10 bar abs



Max. ΔP	3 bar dif.

Process connections	compression type or face seal (VCR/VCO) couplings

Seals	standard: FKM/Viton®; options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds
Weight	1,1 kg
Ingress protection	IP40

Electrical properties

Power supply

+15 … 24 Vdc

Max. power consumption

Supply
15 V
24 V

at voltage I/O
290 mA
200 mA

at current I/O
320 mA
215 mA

extra for fieldbus
<75 mA
<50 mA

Shut-off valve (N/C)

+24 Vdc 3 W; using a shut-off control adapter reduces the power consumption

Analog output

0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)

Digital communication

standard: RS232;
options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, FLOW-BUS

Electrical connection
Analog/RS232	9-pin D-connector (male);



PROFIBUS DP	bus: 9-pin D-connector (female); power: 9-pin D-connector (male);
CANopen® / DeviceNet™	5-pin M12-connector (male);

FLOW-BUS/Modbus-RTU/ASCII	RJ45 modular jack

Modbus TCP / EtherNet/IP / POWERLINK	2 x RJ45 modular jack (in/out);



EtherCAT®/ PROFINET	2 x RJ45 modular jack (in/out)

Control valve options

External actuator options to be connected to the controller

Certification for hazardous areas

Approvals / certificates

Downloads

Brochures
EL-FLOW Select brochure

Manuals
Quick installation guide EL-FLOW Select
Manual EL-FLOW Select

Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
PROFINET
CANopen
EtherNet/IP
Modbus-TCP
POWERLINK
Optional Bus and IO Configurations

Dimensional drawing
Dimensional drawing F-201CS

EL-FLOW Select F-201CS

Gas Mass Flow Controllers with Electrical Shut-Off Valves

Technical specifications

Recommended accessories

Low Flow Serie M-411