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Datasheet FG-200CVP

EL-FLOW Prestige FG-200CVP (P-Insensitive)

高性能氣體質量流量計

  • 靜態和動態壓力校正
  • 内置氣體轉換模型（多流體/多範圍）
  • 嵌入 100 種獨特的氣體
  • 用戶可配置的 I/O 功能
  • 顯著降低功耗
  • 流量信號處理的進一步發展
  • 高度穩定的流量控制機制幾乎不受過程波動的影響
  • 先進的控制閥設計
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EL-FLOW PrestigeFG-200CVP (P-Insensitive)

Pressure Insensitive Gas Mass Flow Controllers for low flow rates

Bronkhorst® model FG-200CVP High Performance Mass Flow Controllers (MFCs) are suited for accurate measurement and control of flow ranges between 0,014…0,7 mln/min and 0,18…9 mln/min at operating pressures between vacuum and 10 bar(g). The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. Model FG-200CVP is equipped with an on-board pressure sensor. In combination with an incorporated gas database with physical properties, the instrument automatically compensates for inlet pressure variations. As a result, the accuracy and control stability will not be affected by these pressure changes.

EL-FLOW® Prestige series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols. The EL-FLOW® Prestige design features standard Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.

thermal gas flow meter
More simple setup possible with EL-FLOW Prestige Pressure Insensitive (PI) model

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0,014…0,7 mln/min
max. 0,18…9 mln/min
(based on N2)
Accuracy (incl. linearity) (based on actual calibration)± 0,5 % RD plus ±0,1%FS
Repeatability< 0,2 % RD
Turndown ratio1:150 (1:50 in analog mode)
Multi Gas/Multi Rangeembedded gas data for 100 unique gases, plus any mixture of maximum 5 of these gases. MG/MR functionality available up to 64 bar.
Settling time (in control, typical)fast: < 500 msec
standard: < 1 sec
slow: < 2 sec
Control stability≤ ± 0,1 % FS (typical for 1 ln/min N2)
Operating temperature-10 … 70 °C
Temperature sensitivityzero: < 0,02% FS/°C; span: < 0,025% Rd/°
Pressure sensitivity< 0,02% Rd/bar typical N2
Max. Kv-value6,6 x 10-2
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Attitude sensitivitymax. error at 90º off horizontal 0,07% FS at 1 bar, typical N2
Warm-up time30 min. for optimum accuracy
2 min. for accuracy ± 1% FS
Mechanical parts
Material (wetted parts)Stainless steel 316L or comparable, degreased for use on oxygen (O2)
Pressure rating (PN)10 bar g
Pressure sensorP-max: 15 bara; Burst pressure: 40 bara
Process connectionscompression type or face seal (VCR/VCO) couplings
Sealsstandard: FKM/Viton®
options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds
valve seat: FFKM with PI film
Weight0,8 kg
Ingress protectionIP40
Electrical properties
Power supply+15 … 24 Vdc
Max. power consumption
Supply
15 V
24 V		 at voltage I/O
202 mA
128 mA		 at current I/O
225 mA
146 mA		 extra for fieldbus
<75 mA
<50 mA

(based on normally closed valve, pin 5 not used)
Analog output0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationstandard: RS232;
options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, FLOW-BUS
CertificationCE / UKCA
Electrical connection
Analog/RS2329-pin D-connector (male);
PROFIBUS DPbus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
CANopen® / DeviceNet™5-pin M12-connector (male);
FLOW-BUS/Modbus-RTU/ASCIIRJ45 modular jack
Modbus TCP / EtherNet/IP / POWERLINK2 x RJ45 modular jack (in/out);
EtherCAT®/ PROFINET2 x RJ45 modular jack (in/out)
IEC 61010-1IEC-61010-1:2010 including national deviations for UL (61010-1:2012) and CSA (C22.2 No. 61010-1-12)
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Downloads

Brochures
EL-FLOW Prestige brochure
Manuals
Quick installation guide
Manual EL-FLOW Prestige
Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
PROFINET
CANopen
EtherNet/IP
Modbus-TCP
POWERLINK
Optional Bus and IO Configurations
Dimensional drawing
Dimensional Drawing FG-200CV - FG-210CV
Download as PDF
台灣柏朗豪斯特股份有限公司

新竹縣竹北市台元街三十八號四樓之一、二
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電話 +886 3-5600-518
[email protected]

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Bronkhorst High-Tech designs and manufactures innovative instruments and subsystems for low-flow measurement and control for use in laboratories, machinery and industry. Driven by a strong sense of sustainability and with many years of experience, we offer an extensive range of (mass) flow meters and controllers for gases and liquids, based on thermal, Coriolis and ultrasonic measuring principles. Our global sales and service network provides local support in more than 40 countries. Discover Bronkhorst®!