MASS FLOW METERS AND CONTROLLERS FOR LIQUIDS - µ-FLOW series

µ-FLOW Mass Flow Meters and Controllers for Liquids

Measurement / Control of Ultra Low Flow Rates

µ-FLOW digital Liquid Flow Meters/Controllers for low flow ranges operate on a thermal, through-flow measuring principle. The instruments are equipped with a digital pc-board, featuring self-diagnostics, alarm and counter functions, digital communication (RS232) and a variety of fieldbus options.

Lowest range 5 ... 100 mg/h
Highest range 0,1 ... 2 g/h (fluids with thermal properties similar to H₂O)

Ask advice

E-book: How to handle low liquid flows

Focusing on low liquid flows < 100 g/h

Download the e-book 'How to handle low liquid flows' to find out more about 'low flows'. Including in-depth information, technical advice and insider tips from our experts.

Download e-book

Quick link to Mass Flow Meter / Controller model pages

Full Scale capacities (based on H₂O) versus Pressure Rating

PN 400 bar (Mass Flow Meter)	PN 100 bar (Mass Flow Controller)
L01 \| 0,1…2 g/h	L01V12 \| 0,1…2 g/h

Features

No moving parts
Thru-Flow measurement
Attitude insensitive
Fast and accurate measurement
Negligible dead-volume (sensor: 1,5...33 µl)
In combination with a control valve: continuous and stable control
Analog I/O-signals, RS232-connection; optional on-board fieldbus interface
Stainless Steel sensor
On request: pressure rating up to 1000 bar (15000 psi)

Liquid Flow Meters / Controllers

Liquid Flow Meters

Liquid mass flow meters of the µ-FLOW series are built around a stainless steel tube without any moving parts or obstructions. The heater/sensor assembly is arranged around the tube and a constant power is applied to warm up the liquid inside the tube. Flowing liquid results in shift of the temperature difference (ΔT) which is proportional to the mass flow. Due to the benefits of the applied sensor, the fluid will be warmed to a maximum of 5°C, thereby making the µ-FLOW Series suitable for fluids with low boiling points.

Liquid Flow Controllers

Flow control is achieved by integrating a control valve onto the body of the Liquid Flow Meter. This control valve has a purge connection to eliminate air or gas during start-up. The electronic control function forms part of the normal circuitry in the meter.

Downloads

Brochures
LIQUI-FLOW - µ-FLOW brochure

Manuals
Manual LIQUI-FLOW incl u-FLOW
Quick Start Guide μ-FLOW

Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
PROFINET
CANopen
EtherNet/IP
Modbus-TCP
POWERLINK
Optional Bus and IO Configurations