IN-FLOW F-130MI mass flow meter

Gas Mass Flow Meters for lowest flow rates

Bronkhorst^® model F-130MI Mass Flow Meters (MFMs) are suited for precise measurement of flow ranges between 0,2…10 ml_n/min and 0,3…15 ml_n/min at operating pressures up to 400 bar. The MFM consists of a thermal mass flow sensor and a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for optional mass flow control by means of a separately mounted control valve. The IN-FLOW model is of rugged design (IP65) for use in industrial environments or even Zone 2 hazardous areas, with optional ATEX Cat. 3 or FM Class I, Div. 2 approval.

IN-FLOW series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols.

기술 정보

Measurement / control system
Flow range (intermediate ranges available)	min. 0,2…10 ml_n/min max. 0,3…15 ml_n/min (based on N₂)









정확도 (선형도) (실제 검교정 기반)	±0,5% Rd plus ±0,1% FS




Repeatability	< 0,2 % RD
Turndown ratio	1:50














Multi fluid capability	Storage of max. 8 calibration curves
Response time (sensor)	typical: 0,5 sec.









Operating temperature	-10 …+70 °C for ATEX cat. 3 and FM Class 1 Div 2 : 0…50°C



Temperature sensitivity	zero: < 0,05% FS/°C; span: < 0,05% Rd/°C








Pressure sensitivity	0,1% Rd/bar typical N₂; 0,01% Rd/bar typical H₂



Leak integrity, outboard	tested < 2 x 10^-9 mbar l/s He



Attitude sensitivity	max. error at 90° off horizontal 0,2% FS at 1 bar, typical N₂
Warm-up time	30 min. for optimum accuracy 2 min for accuracy ± 2% FS

Mechanical parts







Material (wetted parts)	stainless steel 316L or comparable


Pressure rating (PN)	400 bar abs





Process connections	compression type or face seal couplings

Seals	standard: FKM/Viton®; options: EPDM, FFKM/Kalrez®

Ingress protection	IP65

Electrical properties

Power supply

+15 … 24 Vdc

Max. power consumption meter

Supply
15 V
24 V

at voltage I/O
95 mA
65 mA

at current I/O
125 mA
85 mA

extra for fieldbus
<75 mA
<50 mA

Max. Power consumption controller

Supply
15 V
24 V

at voltage I/O
290 mA
200 mA

at current I/O
320 mA
215 mA

extra for fieldbus
<75 mA
<50 mA

아날로그 출력

0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)

Digital communication

standard: RS232;
options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS

Electrical connection
아날로그/RS232	8 DIN (male);



PROFIBUS DP	bus: 5-pin M12 (female); power: 8 DIN (male);
CANopen® / DeviceNet™	5-pin M12 (male);

FLOW-BUS/Modbus-RTU/ASCII	5-pin M12 (male)

Modbus TCP / EtherNet/IP / POWERLINK	bus: 2 x 5-pin M12 (female) (in/out); power: 8 DIN (male);



EtherCAT®/ PROFINET	bus: 2 x 5-pin M12 (female) (in/out); power: 8 DIN (male)


IEC 61010-1	IEC-61010-1:2010 including national deviations for UL (61010-1:2012) and CSA (C22.2 No. 61010-1-12)

Control valve options

External actuator options to be connected to the controller

Certification for hazardous areas

Approvals / certificates

Downloads

Brochures
IN-FLOW brochure

Manuals
General manual digital instruments
Operating instructions digital instruments

Hook-up diagrams
Analog IO - RS232
DeviceNet
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
Industrial Ethernet (EtherCAT, EtherNet/IP, Modbus-TCP, POWERLINK, PROFINET)
CANopen
Optional Bus and IO Configurations