EL-FLOW Prestige FG-200CVP (P-Insensitive)

고성능 가스 질량 흐름 컨트롤러

정적 및 동적 압력 보정
On-board 가스 변환 가능 모델 (Multi-Fluid / Multi-Range)
100여 가지의 고유 가스 정보 내장
사용자 맞춤형 I/O 기능 구성
상당한 전력 소비 감소
흐름 - 신호 체계에서의 상당한 발전
공정 변동에 거의 무관한 매우 안정적인 흐름 제어
뛰어난 제어 밸브 디자인

Pressure Insensitive Gas Mass Flow Controllers for low flow rates

Bronkhorst^® model FG-200CVP High Performance Mass Flow Controllers (MFCs) are suited for accurate measurement and control of flow ranges between 0,014…0,7 ml_n/min and 0,18…9 ml_n/min at operating pressures between vacuum and 10 bar(g). The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. Model FG-200CVP is equipped with an on-board pressure sensor. In combination with an incorporated gas database with physical properties, the instrument automatically compensates for inlet pressure variations. As a result, the accuracy and control stability will not be affected by these pressure changes.

EL-FLOW^® Prestige series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols. The EL-FLOW^® Prestige design features standard Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.

More simple setup possible with EL-FLOW Prestige Pressure Insensitive (PI) model

기술 정보

Measurement / control system
Flow range (intermediate ranges available)	min. 0,014…0,7 ml_n/min max. 0,18…9 ml_n/min (based on N₂)









정확도 (선형도) (실제 검교정 기반)	± 0,5 % RD plus ±0,1%FS




Repeatability	< 0,2 % RD
Turndown ratio	1:150 (1:50 in analog mode)













Multi Gas/Multi Range	embedded gas data for 100 unique gases, plus any mixture of maximum 5 of these gases. MG/MR functionality available up to 64 bar.




Settling time (in control, typical)	fast: < 500 msec standard: < 1 sec slow: < 2 sec



Control stability	≤ ± 0,1 % FS (typical for 1 ln/min N₂)


Operating temperature	-10 … 70 °C



Temperature sensitivity	zero: < 0,02% FS/°C; span: < 0,025% Rd/°








Pressure sensitivity	< 0,02% Rd/bar typical N₂
Max. Kv-value	6,6 x 10^-2


Leak integrity, outboard	tested < 2 x 10^-9 mbar l/s He



Attitude sensitivity	max. error at 90º off horizontal 0,07% FS at 1 bar, typical N₂
Warm-up time	30 min. for optimum accuracy 2 min. for accuracy ± 1% FS

Mechanical parts







Material (wetted parts)	Stainless steel 316L or comparable, degreased for use on oxygen (O₂)


Pressure rating (PN)	10 bar g
Pressure sensor	P-max: 15 bara; Burst pressure: 40 bara




Process connections	compression type or face seal (VCR/VCO) couplings

Seals	standard: FKM/Viton® options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds valve seat: FFKM with PI film
Weight	0,8 kg
Ingress protection	IP40

Electrical properties

Power supply

+15 … 24 Vdc

Max. power consumption

Supply
15 V
24 V

at voltage I/O
202 mA
128 mA

at current I/O
225 mA
146 mA

extra for fieldbus
<75 mA
<50 mA

(based on normally closed valve, pin 5 not used)

아날로그 출력

0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)

Digital communication

standard: RS232;
options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, FLOW-BUS

Certification

CE / UKCA

Electrical connection
아날로그/RS232	9-pin D-connector (male);



PROFIBUS DP	bus: 9-pin D-connector (female); power: 9-pin D-connector (male);
CANopen® / DeviceNet™	5-pin M12-connector (male);

FLOW-BUS/Modbus-RTU/ASCII	RJ45 modular jack

Modbus TCP / EtherNet/IP / POWERLINK	2 x RJ45 modular jack (in/out);



EtherCAT®/ PROFINET	2 x RJ45 modular jack (in/out)


IEC 61010-1	IEC-61010-1:2010 including national deviations for UL (61010-1:2012) and CSA (C22.2 No. 61010-1-12)

Control valve options

External actuator options to be connected to the controller

Certification for hazardous areas

Approvals / certificates

Downloads

Brochures
EL-FLOW Prestige brochure

Manuals
Quick installation guide
Manual EL-FLOW Prestige

Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
PROFINET
CANopen
EtherNet/IP
Modbus-TCP
POWERLINK
Optional Bus and IO Configurations

Dimensional drawing
Dimensional Drawing FG-200CV - FG-210CV

EL-FLOW Prestige FG-200CVP (P-Insensitive)

Pressure Insensitive Gas Mass Flow Controllers for low flow rates

기술 정보

Recommended accessories

Low Flow Serie M-411

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