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Datasheet D-6373-BJ-1-2inch-and-D-6473-BJ-1-2inch

MASS-STREAM D-6373/BJ-1/2 &
D-6473/BJ-1/2 MFC

ガス用直接サーマルマスフローコントローラ、保護等級IP54

  • 実績のある直接インラインCTAセンサ（バイパスなし）
  • 小型・堅牢設計（MFMはIP65、バルブはIP54、防塵防沫）
  • 流量計と大流量・低差圧用モーター駆動弁の組み合わせ
  • 比較的ダスト・ミストの影響を受けにくい
  • オプションの内蔵TFTディスプレイ
お見積り依頼 Downloads Datasheet
MASS-STREAMD-6373/BJ-1/2 &<br />D-6473/BJ-1/2 MFC

IP54 Mass Flow Controllers for high flow rates of gases

Bronkhorst® models D-6373/BJ-1/2" and D-6473/BJ-1/2" Mass Flow Controllers (MFCs) are suited for precise measurement of flow ranges between 2…100 ln/min and 20…1000 ln/min at operating pressures between vacuum and 16 bar (g). The MFC consists of a proven inline thermal (CTA) mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. The instument is IP54 complient and can optionally be equipped with a modern, multi-functional and multi-colour display, with operator buttons on the instrument.

The digital MASS-STREAM™ series is characterized by a high degree of signal integrity and, as an option, up to 8 calibration curves of different gases and process conditions can be memorized in the instrument. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols.

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 2…100 ln/min
max. 20…1000 ln/min
(based on N2)
Accuracy (incl. linearity) (based on actual calibration)± 1 % RD plus ± 0.5% FS (at calibration conditions)
Repeatability< 0,2 % FS
Turndown ratioup to 1:30
Type of gasesalmost all gases, compatible with chosen materials
Response time (sensor)approx. 0,9 sec.
Settling time (in control, typical)< 5 sec.
Control stability< 0,2 % FS typical
Operating temperature0 … 50 °C
Storage / Transport conditionswith display : 0 … 50 °C, max. 95% RH (non-condensing);
without display : -20 … +80 °C, max. 95% RH (non-condensing)
Temperature sensitivityD-63xx : ±0,2% Rd/°C (Air)
D-64xx : ±0,1% Rd/°C (Air)
Pressure sensitivity±0,3% Rd/bar typical (Air)
Max. Kv-value1,1 / 3,4 (remain position)
Leak integrity, outboardtested < 2 x 10-8 mbar l/s He
Attitude sensitivityat 90° deviation from horizontal max. error 0,2 % at 1 bar typical N2
Warm-up time30 min. for optimum accuracy,
within 30 seconds for accuracy ±4% FS
Mechanical parts
SensorStainless steel SS 316 (AISI 316L)
Instrument bodyD-63xx : Aluminium AL 50ST/51ST (anodised) or stainless steel SS 316 /
D-64xx : Aluminium EN AW-6082-T6 (non-anodised) or stainless steel SS 316;
Body of motor driven valve: Brass
Sieves and ringsStainless steel SS 316
Pressure rating (PN)10 bar g for instrument body in aluminium,
16 bar g for instrument body in stainless steel SS 316
Process connectionsG1/2" (D-63xx : RP-type cavity / D-64xx : ISO1179-1 cavity) /
compression type couplings
Sealsstandard: Viton®; option: EPDM
WeightAluminium: 3,3 kg
Stainless steel: 4,4 kg
Ingress protectionIP65 (if applicable IP54 for motor driven valve)
Electrical properties
Power supply+24 Vdc ±10%
Max. power consumption
Supply
24 V		 Basic consumption
260 mA		 Add. for fieldbus
50 mA		 Add. for display
20 mA
Analog output0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationstandard: RS232
options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS
Electrical connection
Analog/RS2328 DIN (male);
PROFIBUS DPbus: 5-pin M12 (female);
power: 8 DIN (male)
CANopen® / DeviceNet™5-pin M12 (male)
Modbus RTU / FLOW-BUS5-pin M12 (male)
Modbus TCP / EtherNet/IP / POWERLINKbus: 2 x 5-pin M12 (female) (in/out);
power: 8 DIN (male);
EtherCAT®/ PROFINETbus: 2 x 5-pin M12 (female) (in/out);
power: 8 DIN (male)
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Downloads

Brochures
MASS-STREAM D-6300 Brochure
MASS-STREAM D-6400 Brochure
Manuals
Manual MASS-STREAM D-6300 instruments
Manual MASS-STREAM D-6300 display
Manual MASS-STREAM D-6400 instruments
Manual MASS-STREAM D-6400 display
Quick installation guide D-6400 series
Hook-up diagrams
Analog I-O RS232
DeviceNet
FLOW-BUS
Modbus
PROFIBUS DP with 5-pin M12 connector
CANopen
Industrial Ethernet
Optional Bus and I-O Configurations
Dimensional drawings
D-6373-BJ 1-2inch
D-6473-BJ 1-2inch
Dimensions Digital Mass-Stream Cases (option)
Dimensions BSPP RP adapters (option for Mass-Stream D-63xx)
Dimensions BSPP ISO 1179-1 adapters (option for Mass-Stream D-64xx)
Solids 3D
D-6373-BJ 1/2 inch
D-6473-BJ-1-2inch
Download as PDF
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〒135-0016
東京都江東区東陽5-27-5
Tel.  03-3645-1371

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Bronkhorst High-Tech designs and manufactures innovative instruments and subsystems for low-flow measurement and control for use in laboratories, machinery and industry. Driven by a strong sense of sustainability and with many years of experience, we offer an extensive range of (mass) flow meters and controllers for gases and liquids, based on thermal, Coriolis and ultrasonic measuring principles. Our global sales and service network provides local support in more than 40 countries. Discover Bronkhorst®!