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Datasheet D-6371A-003AI-and-D-6471A-003AI

MASS-STREAM D-6371A/003AI &
D-6471A/003AI MFC

ガス用直接サーマルマスフローコントローラ、保護等級IP65

  • 実績のある直接インラインCTAセンサ（バイパスなし）
  • 小型・堅牢設計（IP65、防塵耐噴流）
  • 比較的ダスト・ミストの影響を受けにくい
  • オプションの内蔵TFTディスプレイ
  • 優れた価格/機能比
お見積り依頼 Downloads Datasheet
MASS-STREAMD-6371A/003AI &<br />D-6471A/003AI MFC

IP65 Mass Flow Controllers for higher flow rates of gases

Bronkhorst® model D-6371A/003AI and D-6471A/003AI Mass Flow Controllers (MFCs) are suited for precise measurement of flow ranges between 4…200 ln/min and 40…2000 ln/min at operating pressures between vacuum and 20 bar. The MFC consists of a proven inline thermal (CTA) mass flow sensor, a precise pilot-operated control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. The instument is IP65 complient and can optionally be equipped with a modern, multi-functional and multi-colour display, with operator buttons on the instrument.

The digital MASS-STREAM™ series is characterized by a high degree of signal integrity and, as an option, up to 8 calibration curves of different gases and process conditions can be memorized in the instrument. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols.

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 4…200 ln/min
max. 40…2000 ln/min
(based on N2)
Accuracy (incl. linearity) (based on actual calibration)± 1 % RD plus ± 0.5% FS (at calibration conditions)
Repeatability< 0,2 % FS
Turndown ratio1:50
Type of gasesalmost all gases, compatible with chosen materials
Response time (sensor)approx. 0,9 sec.
Settling time (in control, typical)< 5 sec.
Control stability< 0,2 % FS typical
Operating temperature0 … 50 °C
Storage / Transport conditionswith display : 0 … 50 °C, max. 95% RH (non-condensing);
without display : -20 … +80 °C, max. 95% RH (non-condensing)
Temperature sensitivityD-63xx : ±0,2% Rd/°C (Air)
D-64xx : ±0,1% Rd/°C (Air)
Pressure sensitivity±0,3% Rd/bar typical (Air)
Max. Kv-value0,15 … 1,5
Leak integrity, outboardtested < 2 x 10-8 mbar l/s He
Attitude sensitivityat 90° deviation from horizontal max. error 0,2 % at 1 bar typical N2
Warm-up time30 min. for optimum accuracy,
within 30 seconds for accuracy ±4% FS
Mechanical parts
SensorStainless steel SS 316 (AISI 316L)
Instrument bodyStainless steel SS 316
Sieves and ringsStainless steel SS 316
Pressure rating (PN)20 bar g
Max. ΔPup to 20 bar d
Process connectionsG1/2" (D-63xx : RP-type cavity / D-64xx : ISO1179-1 cavity) /
compression type or face seal (VCR/VCO) couplings
Sealsstandard: FKM/Viton®;
option: EPDM, FFKM/Kalrez®
Weight6,5 kg
Ingress protectionIP65
Electrical properties
Power supply+15 … 24 Vdc ±10%
Max. power consumption
Supply
15 V
24 V		 Basic model
300 mA
200 mA		 Add. for fieldbus
80 mA
50 mA		 Add. for display
30 mA
20 mA
Analog output0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationstandard: RS232
options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS
Electrical connection
Analog/RS2328 DIN (male);
PROFIBUS DPbus: 5-pin M12 (female);
power: 8 DIN (male)
CANopen® / DeviceNet™5-pin M12 (male)
Modbus RTU / FLOW-BUS5-pin M12 (male)
Modbus TCP / EtherNet/IP / POWERLINKbus: 2 x 5-pin M12 (female) (in/out);
power: 8 DIN (male);
EtherCAT®/ PROFINETbus: 2 x 5-pin M12 (female) (in/out);
power: 8 DIN (male)
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Downloads

Brochures
MASS-STREAM D-6300 Brochure
MASS-STREAM D-6400 Brochure
Manuals
Manual MASS-STREAM D-6300 instruments
Manual MASS-STREAM D-6300 display
Manual MASS-STREAM D-6400 instruments
Manual MASS-STREAM D-6400 display
Quick installation guide D-6400 series
Hook-up diagrams
Analog I-O RS232
DeviceNet
FLOW-BUS
Modbus
PROFIBUS DP with 5-pin M12 connector
CANopen
Industrial Ethernet
Optional Bus and I-O Configurations
Dimensional drawings
D-6371A-003AI
D-6471A-003AI
Dimensions Digital Mass-Stream Cases (option)
Dimensions BSPP RP adapters (option for Mass-Stream D-63xx)
Dimensions BSPP ISO 1179-1 adapters (option for Mass-Stream D-64xx)
Solids 3D
D-6371A-003AI
D-6471A-003AI
Download as PDF
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〒135-0016
東京都江東区東陽5-27-5
Tel.  03-3645-1371

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Bronkhorst High-Tech designs and manufactures innovative instruments and subsystems for low-flow measurement and control for use in laboratories, machinery and industry. Driven by a strong sense of sustainability and with many years of experience, we offer an extensive range of (mass) flow meters and controllers for gases and liquids, based on thermal, Coriolis and ultrasonic measuring principles. Our global sales and service network provides local support in more than 40 countries. Discover Bronkhorst®!