IQ+FLOW IQFD-200C Downported MFC

ガス用マイクロフルイディックマスフローコントローラ、ダウンポート型

小フットプリントによる優れたスペース効率
非常に小さい内容積
低保有コスト、経済的なソリューション
アナログ入出力・デジタル通信
アクセスが容易なトップマウント型

MEMS based Mass Flow Controller for Gases, for OEM Applications

Bronkhorst^® IQ⁺FLOW^® model IQFD-200C Mass Flow Controllers (MFCs) are suited for precise control of dry, clean, non-corrosive, non-explosive gases. The ultra compact, downported MFC has a chip-based (MEMS) thermal mass flow sensor and is suited for flow ranges between 0,2…10 ml_n/min and 0,1…5 l_n/min N₂-equivalent at operating pressures between vacuum and 10 bar(g). Communication with the devices can be either in analog mode or digital over RS232 or RS485.

The ultra compact IQ⁺FLOW instruments are typically recommended for integration in analytical and medical equipment.

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)	min. 0,2…10 ml_n/min max. 0,1…5 l_n/min (based on N₂)









Accuracy (incl. linearity) (based on actual calibration)	< ±1,5% RD + ±0,5% FS (Based on calibration with actual gas, at ambient temperature and at customer specified inlet pressure. Horizontal mounting position.)




Repeatability	for flows < 20 ml_n/min: < ±0.5% FS; for flows > 20 ml_n/min: < ±0,5% RD
Turndown ratio	1:50 (2…100%)

Operating pressure	0 … 10 bar g






Media	Dry, clean, non-corrosive gases. Standard calibration gases Air, N₂, Ar, He, CO₂ and H₂. Other dry, clean, non-corrosive gases on request (O₂, CO, …)





Multi fluid capability	Storage of max. 8 calibration curves



Settling time (in control, typical)	t98% down to 300 msec, 700 msec typical






Operating temperature	5 … 50 °C



Temperature sensitivity	span: 0,2% RD/°C; zero: 0,01 ml_n/min/°C









Max. Kv-value	2,37 x 10^-3


Leak integrity, outboard	< 1 x 10^-8 mbar∙l/s He



Attitude sensitivity	max. error at 90° off horizontal 0,5 ml_n/min at 1 bar, typical N₂

Mechanical parts







Material (wetted parts)	aluminium, Si, SiOx, epoxy; option: stainless steel body (SS316L)








Process connections	downported construction

Seals	standard: Viton®; other on request
Weight	120 g (Aluminium) / 180 g (SS316L)
Ingress protection	IP40



Max. differential pressure across control valve	9 bar dif.

Electrical properties
Readout sample time	2 msec
Power supply	+ 15 … 24 Vdc


Max. power consumption	100 mA







Analog output	0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)







Digital communication	RS232, RS485 (Modbus-RTU/ASCII or FLOW-BUS)

Electrical connection










Power/Analog/RS232/RS485	RJ45 modular jack

Control valve options

External actuator options to be connected to the controller

Certification for hazardous areas

Approvals / certificates

Downloads

Brochures
IQ-FLOW Brochure

Manuals
Manual IQ-FLOW
Quick installation guide

Hook-up diagrams
RS232-RS485

Dimensional drawing
Dimensional drawing IQFD-IQPD 1-channel topmount

Solids 3D
IQFD-100C-200C

IQ+FLOW IQFD-200C Downported MFC

MEMS based Mass Flow Controller for Gases, for OEM Applications

Technical specifications

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