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Datasheet IQF-100C

IQ+FLOW IQF-100C MFM

ガス用マイクロフルイディックマスフローメータ

  • 小フットプリントによる優れたスペース効率
  • 非常に小さい内容積
  • 低保有コスト、経済的なソリューション
  • アナログ入出力・デジタル通信
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IQ+FLOWIQF-100C MFM

MEMS based Mass Flow Meter for Gases, for OEM Applications

Bronkhorst® IQ+FLOW® model IQF-100C Mass Flow Meters (MFMs) are suited for precise measurement of dry, clean, non-corrosive, non-explosive gases. The ultra compact MFM has a chip-based (MEMS) thermal mass flow sensor and is suited for flow ranges between 0,2…10 mln/min and 0,1…5 ln/min N2-equivalent at operating pressures between vacuum and 10 bar(g). Communication with the devices can be either in analog mode or digital over RS232 or RS485.

The ultra compact IQ+FLOW instruments are typically recommended for integration in analytical and medical equipment.

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0,2…10 mln/min
max. 0,1…5 ln/min
(based on N2)
Accuracy (incl. linearity) (based on actual calibration)< ±1,5% RD + ±0,5% FS
(Based on calibration with actual gas, at ambient temperature and at customer specified inlet pressure. Horizontal mounting position.)
Repeatabilityfor flows < 20 mln/min: < ±0.5% FS;
for flows > 20 mln/min: < ±0,5% RD
Turndown ratio1:50 (2…100%)
Operating pressure0 … 10 bar g
FluidsDry, clean, non-corrosive gases. Standard calibration gases Air, N2, Ar, He, CO2 and H2. Other dry, clean, non-corrosive gases on request (O2, CO, …)
Multi fluid capabilityStorage of max. 8 calibration curves
Operating temperature5 … 50 °C
Temperature sensitivityspan: 0,2% RD/°C; zero: 0,01 mln/min/°C
Pressure drop0,3 psi dif (20 mbard) based on 1 ln/min Air at 0 bar(g)
Leak integrity, outboard< 1 x 10-8 mbar∙l/s He
Attitude sensitivitymax. error at 90° off horizontal 0,5 mln/min at 1 bar, typical N2
Mechanical parts
Material (wetted parts)aluminium, Si, SiOx, epoxy;
option: stainless steel body (SS316L)
Process connectionsoptional: 10-32 UNF threaded internal nut with 1/16” ferrule (SS316 or Peek);
1/16” or 1/8” OD compression type
Sealsstandard: Viton®; other on request
Weight100 g (Aluminium) / 160 g (SS316L)
Ingress protectionIP40
Electrical properties
Readout sample time2 msec
Power supply+ 15 … 24 Vdc
Max. power consumption50 mA
Analog output0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationRS232, RS485 (Modbus-RTU/ASCII or FLOW-BUS)
Electrical connection
Power/Analog/RS232/RS485RJ45 modular jack
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Downloads

Brochures
IQ-FLOW Brochure
Manuals
Manual IQ-FLOW
Quick installation guide
Hook-up diagrams
RS232-RS485
Dimensional drawing
Dimensional drawing IQF-IQP 1-channel in-line
Solids 3D
IQF-100C-200C
Download as PDF
ブロンコスト・ジャパン株式会社
〒135-0016
東京都江東区東陽5-27-5
Tel.  03-3645-1371

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Bronkhorst High-Tech designs and manufactures innovative instruments and subsystems for low-flow measurement and control for use in laboratories, machinery and industry. Driven by a strong sense of sustainability and with many years of experience, we offer an extensive range of (mass) flow meters and controllers for gases and liquids, based on thermal, Coriolis and ultrasonic measuring principles. Our global sales and service network provides local support in more than 40 countries. Discover Bronkhorst®!