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Datasheet F-200CI

IN-FLOW F-200CI

Industrial Style Thermal Mass Flow Controller for Gases

  • Lowest gas flow rates
  • Compact design, small internal volume
  • High accuracy and repeatability
  • Virtually pressure and temperature independent
  • Rugged, weatherproof housing (IP65, dust and waterproof)
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IN-FLOWF-200CI

Industrial Style Gas Mass Flow Controllers for lowest flow rates

Bronkhorst® model F-200CI Mass Flow Controllers (MFCs) are suited for precise measurement of flow ranges between 0,014…0,7 mln/min and 0,6…9 mln/min with pressure rating between vacuum and 64 bar. The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. The IN-FLOW model is of rugged design (IP65) for use in industrial environments or even Zone 2 hazardous areas, with optional ATEX Cat. 3 or FM Class I, Div. 2 approval.

IN-FLOW series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols.

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0,014…0,7 mln/min
max. 0,18…9 mln/min
(based on N2)
Accuracy (incl. linearity) (based on actual calibration)±0,8% Rd plus ±0,2% FS for F-200CI-005;
±2% FS for F-200CI-002
Repeatability< 0,2 % RD
Turndown ratioup to 1:187,5 (1:50 in analog mode)
Multi fluid capabilityStorage of max. 8 calibration curves
Settling time (in control, typical)2 … 4 sec.
Control stability< ± 0,1 % FS
Operating temperature-10 … +70 °C
for ATEX cat. 3 and FM Class 1 Div 2 : 0…50°C
Temperature sensitivityzero: < 0,05% FS/°C; span: < 0,05% Rd/°C
Pressure sensitivity0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2
Max. Kv-value6,6 x 10-2
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Attitude sensitivitymax. error at 90° off horizontal 0,2% at 1 bar, typical N2
Warm-up time30 min. for optimum accuracy
2 min for accuracy ± 2% FS
Mechanical parts
Material (wetted parts)stainless steel 316L or comparable
Pressure rating (PN)64 bar abs
Process connectionscompression type or face seal couplings
Sealsstandard: FKM/Viton®;
options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds
Weight1,3 kg
Ingress protectionIP65
Electrical properties
Power supply+15 … 24 Vdc
Max. power consumption
Supply
15 V
24 V		 at voltage I/O
290 mA
200 mA		 at current I/O
320 mA
215 mA		 extra for fieldbus
<75 mA
<50 mA
Analog output0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationstandard: RS232;
options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS
Electrical connection
Analog/RS2328 DIN (male);
PROFIBUS DPbus: 5-pin M12 (female);
power: 8 DIN (male);
CANopen® / DeviceNet™5-pin M12 (male);
FLOW-BUS/Modbus-RTU/ASCII5-pin M12 (male)
Modbus TCP / EtherNet/IP / POWERLINKbus: 2 x 5-pin M12 (female) (in/out);
power: 8 DIN (male);
EtherCAT®/ PROFINETbus: 2 x 5-pin M12 (female) (in/out);
power: 8 DIN (male);
IEC 61010-1IEC-61010-1:2010 including national deviations for UL (61010-1:2012) and CSA (C22.2 No. 61010-1-12)
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Downloads

Brochures
IN-FLOW brochure
Manuals
General manual digital instruments
Operating instructions digital instruments
Hook-up diagrams
Analog IO - RS232
DeviceNet
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
PROFINET
CANopen
Optional Bus and IO Configurations
Dimensional drawing
Dimensional Drawing F-200CI
Certificates
ATEX: KEMA 10ATEX0111X
KCs certificate IN-FLOW MFC models (Korean)
FM approval Class I, Div. 2 (US), FM17US0363X
FM approval Class I, Div. 2 (CA), FM17CA0173X
Download as PDF
ブロンコスト・ジャパン株式会社
〒135-0016
東京都江東区東陽5-27-5
Tel.  03-3645-1371

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Bronkhorst High-Tech designs and manufactures innovative instruments and subsystems for low-flow measurement and control for use in laboratories, machinery and industry. Driven by a strong sense of sustainability and with many years of experience, we offer an extensive range of (mass) flow meters and controllers for gases and liquids, based on thermal, Coriolis and ultrasonic measuring principles. Our global sales and service network provides local support in more than 40 countries. Discover Bronkhorst®!