FF-M0x

Mass Flow/Pressure Meters for Low Gas Flows

FLEXI-FLOW Compact models FF-M00 and FF-M01 Mass Flow / Pressure Meters are suited for accurate measurement of flow ranges between 0…5 ml_n/min and 0…200 ml_n/min at operating pressures between 0,8 and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique, internationally patented TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion.

The multi-parameter instruments are Built-to-Order (BtO) and provide the user with useful process information:
- Model FF-M00: flow + temperature
- Model FF-M01: flow + temperature + up- and downstream pressure

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)	min. 0…5 ml_n/min max. 0…200 ml_n/min (based on N₂)





Pressure ranges	FF-M00: not available / FF-M01: 0...17 bar(a)



Accuracy (incl. linearity) (based on actual calibration)	Up to ±0,5% Rd plus ±0,1% FS (N₂/Air/O₂); for other gases add conversion uncertainty; see multi gas table;




Repeatability	Flow sensor: < ±0,2% Rd; Pressure sensors: < ±0,2% FS
Turndown ratio	up to 1:1000; ≤ 20 mln/min: up to 1:500


Max. operating pressure	16 bar g










Multi Gas/Multi Range	embedded gas data for 22 unique gases plus any mixture of these gases

Response time (sensor)	< 30 ms (T₆₃)



Long term stability	< 0,5% FS over period of 3 years; then < 0,2% FS per year





Operating temperature	0 … 50 °C
Storage / Transport conditions	-20 … +80 °C, max. 95% RH (non-condensing)

Mounting	any position, attitude sensitivity negligible
Temperature sensitivity	Flow sensor: zero 0,015% FS/ºC; span 0,05% Rd/ºC; Pressure sensors: zero 0,16 mbar/ºC; span 0,05% Rd/ºC
Temperature accuracy	± 0,2 ºC (instrument body temperature)
Accuracy pressure sensors	±0,5% FS






Pressure sensitivity	standard: < 0,15% Rd/bar typical N₂; with pressure correction: typical factor 5 improved



Leak integrity, outboard	tested < 2 x 10^-9 mbar l/s He

Mechanical parts

Instrument body	Aluminium or Stainless steel (selectable)





Material (wetted parts)	aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass
Surface quality	< 1,6 mu Ra (<0,8 mu Ra for stainless steel body)

Pressure rating (PN)	16 bar(g) / 250 psig





Process connections	1/8" BSPP female thread; couplings to be ordered separately

Seals	default: FKM 51415; for other materials contact factory
Weight	250 g with Aluminium body, 350 g with SS 316 body; add 50 g for Ethernet interface
Ingress protection	IP40

Electrical properties

Power supply	24 Vdc ± 10%


Max. power consumption	0,5 Watt; add 0,9 Watt for EtherNet communication















Digital communication	Modbus RTU or FLOW-BUS (selectable) Optional: PROFINET, EtherCAT, Modbus-TCP, Ethernet/IP or POWERLINK







Support interface	USB-C port for easy setup; Optional Bluetooth connection for monitoring


Electrical connection	9-pin D-sub (male)
Certification	CE / UKCA / KC

Electrical connection

Control valve options

External actuator options to be connected to the controller

Certification for hazardous areas

Approvals / certificates

Hook-up diagrams

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カタログ
FLEXI-FLOW カタログ

取扱説明書
FLEXI-FLOW 取扱説明書
FLEXI-FLOW 簡易操作手引き
継手取付要領（食い込み継手）RS
継手取付要領（プッシュイン継手）
継手取付要領（食い込み継手）ISO

配線図
FLEXI-FLOW Compact Modbus-RTU / FLOW-BUS
FLEXI-FLOW Compact Ethernet

外形寸法図
Dimensional drawing FF-M0x

3D CAD図
FLEXI-FLOW Compact FF-M0x - Modbus-RTU / FLOW-BUS
FLEXI-FLOW Compact FF-M0x - Ethernet

FLEXI-FLOW Compact FF-M0x

Mass Flow/Pressure Meters for Low Gas Flows

Technical specifications

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