F-210CX

Intrinsically Safe Gas Mass Flow Controllers for lowest flow rates

Bronkhorst^® EX-FLOW Mass Flow Controllers (MFCs) are suited for precise gas flow control in ATEX Zone 1 hazardous areas. The flow meter part and the control valve of the MFC should be connected (via separate cables) to a power supply with galvanic isolation / preamplifier / readout system (located in the safe zone) which contains a controller board to complete the control loop. See Bronkhorst^® E-8000 Series.

EX-FLOW model F-210CX covers a flow range of 0,19...9,5 ml_n/min (N₂-equivalent) at operating pressures up to 100 bar.

The intrinsically safe measuring head of the flow meter is tested according to ATEX 114 Directive 2014/34/EU and approved under EC-Type Examination Number: KEMA 01ATEX1172, protection II 2 G Ex ib IIC T4 Gb.
The intrinsically safe valve coils are explosion proof certified and available in two options (ATEX certification only):
Coil XB: protection II 1 G Ex ia IIC T6 / protection II 1 D Ex ta IIIC T80°C
Coil XC: protection II 2 G Ex eb IIC T4 / protection II 2 D Ex tb IIIC T130°C

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)	min. 0,19…9,5 ml_n/min max. 0,2…10 ml_n/min (based on N₂)









Accuracy (incl. linearity) (based on actual calibration)	± 1 % FS




Repeatability	< 0,2 % RD
Turndown ratio	1:50 (2…100%)
















Time constant	5 sec.





Control stability	≤ ± 0,1 % FS typical


Operating temperature	-10 … +65 °C



Temperature sensitivity	zero: < 0,05% FS/°C; span: < 0,05% Rd/°C









Max. Kv-value	Valve with XB-coil: 4,3 x 10^-3 / Valve with XC-coil: 6,6 x 10^-2


Leak integrity, outboard	tested < 2 x 10^-9 mbar l/s He



Attitude sensitivity	max. error at 90° off horizontal 0,2% FS at 1 bar, typical N₂
Warm-up time	30 min. for optimum accuracy 2 min. for accuracy ± 2% FS

Mechanical parts







Material (wetted parts)	Stainless steel 316L or comparable


Pressure rating (PN)	100 bar abs





Process connections	compression type or face seal (VCR/VCO) couplings

Seals	standard: FKM/Viton®; options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds

Ingress protection	IP65

Electrical properties
























Output signal	15 … 20 mA (linear) Terminal connection, cable gland M16x1,5
I/O signals via PS/Readout (located in safe area)	analog: 0…5 Vdc, 0…10 Vdc, 0…20 mA, 4…20 mA; digital: RS232, PROFIBUS DP, DeviceNet™, Modbus RTU or ASCII, PROFINET, EtherCAT®, FLOW- BUS









XB-coil	Coil voltage max. 28 V/110 mA; 295 Ohm at 20°C
XC-coil	Coil voltage max. 24 V; 65 Ohm at 20°C, Pmax = 9 W at 20°C

Electrical connection











Ex-proof measuring head	Terminal connection, cable gland M16x1,5



Control valve coil	cable gland M20x1,5

Control valve options

External actuator options to be connected to the controller

Certification for hazardous areas

Approvals / certificates

Downloads

Brochures
EX-FLOW brochure

Manuals
Manual EX-FLOW meters and controllers - ATEX
Manual EX-FLOW meters and controllers - IECEx
Manual EX-FLOW meters and controllers - TIIS

Hook-up diagram
MFM Measuring Head
XB-Coil
XC-Coil

Dimensional drawing
Dimensional drawing F-200CX-F-210CX

Certificates
IECEx Certificate EX-FLOW MFM Measuring Head X100 : IECEx DEK14.0060
TIIS Certificate EX-FLOW MFM Measuring head X100 : 検・第TC21584号 (Japanese certification)
KCs Certificate EX-FLOW MFM Measuring Head X100 :: Ex ib IIC T4 (Korean certification)
ATEX CAT 2 Certificate EX-FLOW MFM Measuring Head X100 : KEMA 01ATEX1172
EU Declaration of Conformity Measuring Head X100 : ATEX CAT 2 (doc. 9.06.032)
ATEX CAT 2 Certificate XB-coil
ATEX CAT 2 Certificate XC-coil
ATEX CAT 2 Notification Directive 2014/34/EU : DEKRA 12ATEXQ0100

EX-FLOW F-210CX

Intrinsically Safe Gas Mass Flow Controllers for lowest flow rates

Technical specifications

Recommended accessories

Ultra Low Flow Serie M-410

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