Pressure Insensitive Gas Mass Flow Controllers for low flow rates
Bronkhorst® model FG-210CVP High Performance Mass Flow Controllers (MFCs) are suited for accurate measurement and control of flow ranges between 0,014…0,7 mln/min and 0,18…9 mln/min at operating pressures between vacuum and 100 bar. The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. Model FG-210CVP is equipped with an on-board pressure sensor. In combination with an incorporated gas database with physical properties, the instrument automatically compensates for inlet pressure variations. As a result, the accuracy and control stability will not be affected by these pressure changes.