EL-FLOW Prestige FG-111BP (P-Insensitive)

ガス用高性能マスフローメータ

オンボード圧力補正
オンボードガスコンバージョンモデル（マルチフルード／マルチレンジ）
約100種のガスデータ内蔵
カスタマイズ可能なI/Oオプション
消費電力の低減（EL-FLOW Select比）
流量/信号処理技術の更なる進化

Gas Mass Flow Meters for low flow rates

Bronkhorst^® model FG-111BP High Performance Mass Flow Meters (MFMs) are suited for precise measurement of flow ranges between 0,14…7 ml_n/min and 0,4…20 l_n/min at operating pressures between vacuum and 100 bar. The MFM consists of a thermal mass flow sensor and a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for optional mass flow control by means of a separately mounted control valve.

EL-FLOW^® Prestige series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols. The EL-FLOW^® Prestige design features standard Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)	min. 0,14…7 ml_n/min max. 0,4…20 l_n/min (based on N₂)









Accuracy (incl. linearity) (based on actual calibration)	± 0,5 % RD plus ±0,1%FS




Repeatability	< 0,2 % RD
Turndown ratio	1:150 (1:50 in analog mode)













Multi Gas/Multi Range	embedded gas data for 100 unique gases, plus any mixture of maximum 5 of these gases. MG/MR functionality available up to 64 bar.











Operating temperature	-10 … 70 °C



Temperature sensitivity	zero: < 0,02% FS/°C; span: < 0,025% Rd/°C








Pressure sensitivity	< 0,02% Rd/bar typical N₂



Leak integrity, outboard	tested < 2 x 10^-9 mbar l/s He



Attitude sensitivity	max. error at 90º off horizontal 0,07% FS at 1 bar, typical N₂
Warm-up time	30 min. for optimum accuracy 2 min. for accuracy ± 1% FS

Mechanical parts







Material (wetted parts)	Stainless steel 316L or comparable, degreased for use on oxygen (O₂)


Pressure rating (PN)	100 bar g
Pressure sensor	P-max: 130 bara; Burst pressure 350 bara




Process connections	compression type or face seal (VCR/VCO) couplings

Seals	standard: FKM/Viton® options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds
Weight	0,7 kg
Ingress protection	IP40

Electrical properties

Power supply

+15 … 24 Vdc

Max. power consumption meter

Supply
15 V
24 V

at voltage I/O
69 mA
45 mA

at current I/O
92 mA
63 mA

extra for fieldbus
<75 mA
<50 mA

Max. Power consumption controller

Supply
15 V
24 V

at voltage I/O
202 mA
128 mA

at current I/O
225 mA
146 mA

extra for fieldbus
<75 mA
<50 mA

(based on normally closed valve, pin 5 not used)

Analog output

0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)

Digital communication

standard: RS232;
options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, FLOW-BUS

Certification

CE / UKCA

Electrical connection
Analog/RS232	9-pin D-connector (male);



PROFIBUS DP	bus: 9-pin D-connector (female); power: 9-pin D-connector (male);
CANopen® / DeviceNet™	5-pin M12-connector (male);

FLOW-BUS/Modbus-RTU/ASCII	RJ45 modular jack

Modbus TCP / EtherNet/IP / POWERLINK	2 x RJ45 modular jack (in/out);



EtherCAT®/ PROFINET	2 x RJ45 modular jack (in/out)


IEC 61010-1	IEC-61010-1:2010 including national deviations for UL (61010-1:2012) and CSA (C22.2 No. 61010-1-12)

Control valve options

External actuator options to be connected to the controller

Certification for hazardous areas

Approvals / certificates

Downloads

Brochures
EL-FLOW Prestige brochure

Manuals
Quick installation guide
Manual EL-FLOW Prestige

Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
PROFINET
CANopen
EtherNet/IP
Modbus-TCP
POWERLINK
Optional Bus and IO Configurations

Dimensional drawing
Dimensional Drawing FG-111BP

EL-FLOW Prestige FG-111BP (P-Insensitive)

Gas Mass Flow Meters for low flow rates

Technical specifications

Recommended accessories

Low Flow Serie M-411

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