EL-FLOW Metal Sealed F-111CM

ガス用メタルシール型マスフローメータ

特許取得済のメタルtoメタルシール構造による長期間のリークタイト性（外部リーク）
中接触部品の高い表面品質
クリーンルームにて組み立て
高精度、優れた繰り返し性
マルチガス・マルチレンジ機能（オプション）

Metal Sealed Gas Mass Flow Meters

Bronkhorst^® model F-111CM Mass Flow Meters (MFMs) designed especially to meet the requirements of the semicon market as well as other high purity gas applications. The instruments feature high surface quality and are of modular construction with metal-to-metal seals that ensure long-term leak tightness. The F-111CM is suited for precise measurement of flow ranges between 0.12…6 sccm up to 1…50 slm (based on N₂) at operating pressures between vacuum and 1450 psig (100 bar).

EL-FLOW^® Metal Sealed series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols. The EL-FLOW^® Metal Sealed design features optional Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)	min. 0,12…6 ml_n/min max. 1…50 l_n/min (based on N₂)









Accuracy (incl. linearity) (based on actual calibration)	±0,5% Rd plus ±0,1% FS




Repeatability	< 0,2 % RD
Turndown ratio	1:150 (1:50 in analog mode)


Max. operating pressure	1450 psig (100 barg)











Multi fluid capability	storage of max. 8 calibration curves; optional Multi Gas / Multi Range functionality up to 10 bar abs










Operating temperature	-10…+70 °C


Mounting	any position, attitude sensitivity negligible
Temperature sensitivity	zero: < 0.05% FS/°C; span: < 0.05% Rd/°C








Pressure sensitivity	< 0,1% Rd/bar typical N₂; < 0,01% Rd/bar H₂



Leak integrity, outboard	< 2 x 10^-11 Pa.m³/s He




Warm-up time	30 min. for optimum accuracy 2 min for accuracy ± 2% FS

Mechanical parts







Material (wetted parts)	stainless steel 316L or comparable








Process connections	1/4” face seal male

Seals	Outer seals: metal-to-metal (no rings); Inner seal: Kalrez 6375
Weight	0,6 kg
Ingress protection	IP40

Electrical properties

Power supply

+ 15 … 24 Vdc

Max. power consumption

Supply
15 V
24 V

at voltage I/O
95 mA
65 mA

at current I/O
125 mA
85 mA

extra for fieldbus
<75 mA
<50 mA

Analog output

0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)

Digital communication

standard: RS232;
options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, FLOW-BUS

Electrical connection
Analog/RS232	9-pin D-connector (male);



PROFIBUS DP	bus: 9-pin D-connector (female); power: 9-pin D-connector (male);
CANopen® / DeviceNet™	5-pin M12-connector (male);

FLOW-BUS/Modbus-RTU/ASCII	RJ45 modular jack

Modbus TCP / EtherNet/IP / POWERLINK	2 x RJ45 modular jack (in/out);



EtherCAT®/ PROFINET	2 x RJ45 modular jack (in/out)

Control valve options

External actuator options to be connected to the controller

Certification for hazardous areas

Approvals / certificates

Downloads

Brochures
Metal Sealed Mass Flow and Pressure brochure

Manuals
Quick start guide EL-FLOW Metal Sealed
Manual EL-FLOW Select

Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
PROFINET
CANopen
EtherNet/IP
Modbus-TCP
POWERLINK
Optional Bus and IO Configurations

Dimensional drawings
Dimensional drawing F-111CM
Dimensions Digital Cases

EL-FLOW Metal Sealed F-111CM

Metal Sealed Gas Mass Flow Meters

Technical specifications

Downloads

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