Vapour Flow Control

Our unique and patented 'CEM' technology, which stands for Controlled Evaporation Mixing, is developed for accurate vapour flow control. Traditional bubbler systems are often not capable of handling sufficient quantities of liquid with a low vapour pressure, or perform in an imperfect way. Moreover, they cannot instantaneously provide vapour of a mixture of liquids with different vapour pressures. These issues are overcome with our vapour delivery solutions.

Bronkhorst's evaporation technology is fast, accurate, highly repeatable and efficient.

CEM-Technology: Controlled Evaporation Mixing

The CEM-System (Controlled Evaporation and Mixing) is an innovative Liquid Delivery System (LDS) that can be applied for atmospheric or vacuum processes. The vapour generation system consists of a (thermal or Coriolis) liquid flow controller, an MFC for carrier gas and a temperature controlled mixing and evaporation device. The system is suitable for mixing liquid flows of 1-1200 g/h resulting in saturated vapour flows of 50 ml_n/min up to 100 l_n/min. This vaporiser system can replace bubblers. New opportunities created with the CEM-system: mixtures can be evaporated and even solids, dissolved in solvents can be vaporised successfully.

Features

accurately controlled gas/liquid mixture
fast response
high reproduceability
very stable vapour flow
flexible selection of gas/liquid ratio
lower working temperature than conventional systems
optional control by PC/PLC (RS232/fieldbus)

Video Vapour Delivery Modules

In this video, we present our all-in-one solution for an accurately controlled vapour flow, providing fast response and high flexibility: The VDM-Series Vapour Delivery Modules.

VDM-Series: Vapour Delivery Modules

Based on the CEM-technology as described above, we designed a new series of Vapour Delivery Modules. These compact sub-systems incorporate the components of the CEM-System and more! Besides gas and liquid flow controllers and the temperature controlled evaporator, the VDM-Series feature integrated power supply with display (1.8” TFT) and control functions. As an option, the unit offers local or remote trace heating temperature control. The compact, ‘plug and work’ module can generate (saturated) vapour flows within the range of 100 ml_n/min up to 10 l_n/min. It can be applied for atmospheric or vacuum processes and is capable of evaporating mixtures and even solids, dissolved in solvents.

Additional features (compared to separate CEM system components)

No need for engineering or manufacturing
Pre-tested, safe and ready to use
Readout/Control panel, incl. 1,8” TFT display, alarm/signaling and counter functions.
Integrated fieldbus interface (option)

Vapour Control Applications

CVD (Chemical Vapour Deposition), e.g. for hardening, thin film coating or planarisation processes
Testing/calibration of analysers with reference gas vapour concentrations
Toxic gas effects on protective clothing
Analysers with reference H2O vapour concentrations
Humidification of fuels
Anaesthetics
Sorption experiments or processes in pharma or food applications

Application stories

Source: Zeton BV

Downloads

Brochures
CEM and VDM brochure: Solutions for Vapour Flow Control

Manuals
Manual CEM Controlled Evaporator and Mixer
Manual Vapor Delivery Module

Select your model

Model	Description	Max. capacity (based on water)	Max. capacity	Max. temp.
W-101A	10 W, for µ-FLOW	2 g/h Liquid	4 l_n/min Gas	200°C
W-102A	10 W, for LIQUI-FLOW™/ mini CORI-FLOW™	30 g/h Liquid	4 l_n/min Gas	200°C
W-202A	100 W, for LIQUI-FLOW™/ mini CORI-FLOW™	120 g/h Liquid	10 l_n/min Gas	200°C
W-303B	1000 W, for LIQUI-FLOW™/ mini CORI-FLOW™	1200 g/h Liquid	100 l_n/min Gas	200°C
SW-100	10 W, VDM-Series	30 g/h Liquid	4 l_n/min Gas	200°C
SW-200	100 W, VDM-Series	120 g/h Liquid	10 l_n/min Gas	200°C