MEMS based Mass Flow Meter for Gases, for OEM Applications
Bronkhorst® IQ+FLOW® model IQFD-100C Mass Flow Meters (MFMs) are suited for precise measurement of dry, clean, non-corrosive, non-explosive gases. The ultra compact, downported MFM has a chip-based (MEMS) thermal mass flow sensor and is suited for flow ranges between 0,2…10 mln/min and 0,1…5 ln/min N2-equivalent at operating pressures between vacuum and 10 bar(g). Communication with the devices can be either in analog mode or digital over RS232 or RS485.
The ultra compact IQ+FLOW instruments are typically recommended for integration in analytical and medical equipment.