High-Pressure Mass Flow Meter for Gases, Ex-proof Style

  • ATEX approval Cat.2, Zone 1
  • Also IECEx, TIIS and KCs certified
  • High accuracy, excellent repeatability
  • Virtually pressure and temperature independent
  • Pressure rating 400 bar
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Intrinsically Safe Gas Mass Flow Meters for low flow rates

Bronkhorst® EX-FLOW Mass Flow Meters (MFMs) are suited for precise gas flow measurement in ATEX Zone 1 hazardous areas. The MFM should be connected to a power supply with galvanic isolation / preamplifier / readout system (located in the safe zone). See Bronkhorst® E-8000 Series.

EX-FLOW model F-130MX covers flow ranges from 0,15...7,5 mln/min up to 0,19...9,5 mln/min (N2-equivalent) at operating pressures up to 400 bar.

The intrinsically safe measuring head of the flow meter is tested according to ATEX 114 Directive 2014/34/EU and approved under EC-Type Examination Number: KEMA 01ATEX1172, protection II 2 G Ex ib IIC T4 Gb.
Other certifications: IECEx (IECEx DEK14.0060) and TIIS (検・第TC21584号).

Technical specifications

Measurement / control system
Flow range, based on N2
(intermediate ranges available)
min. 0,15...7,5 mln/min
max. 0,19...9,5 mln/min
Accuracy (incl. linearity)
(based on actual calibration)
±1% FS
Repeatability < 0,2% Rd
Turndown 1 : 50 (in digital mode up to 1 : 150)
Max. operating pressure meter: 1500 psig;
controller: 1000 psig
Temperature sensitivity zero: < 0.05% FS/°C; span: < 0.05% Rd/°C
Pressure sensitivity < 0,1% Rd/bar typical N2;
< 0,01% Rd/bar H2
Warm-up time 30 min. for optimum accuracy
2 min for accuracy ± 2% FS
General performance
Operating temperature -10…+50°C;
up to +70°C on request
Leak integrity(outboard) < 2 x 10-11 Pa.m3/s He
Leak-by through closed valve < 10-5 Pa.m3/s He
Attitude sensitivity may be mounted in any position
Mechanical parts
Material (wetted parts) stainless steel 316L or comparable
Process connections 1/4” face seal male
Outer seals metal-to-metal (no rings)
Valve seat (controllers) Kalrez® (FFKM); options: Viton®, EPDM
Ingress protection (housing) IP40
Electrical properties
Power supply +15…24 Vdc
Max. power consumption (controllers based on normally closed valve, pin 5 not used


15 V
24 V
15 V
24 V
at voltage I/O
95 mA
65 mA
290 mA
200 mA
at current I/O
125 mA
85 mA
320 mA
215 mA
If applicable: PROFIBUS DP add 53 mA (15 V supply) or 30 mA (24 V supply)
PROFINET add 77 mA (15 V supply) or 48 mA (24 V supply)
EtherCAT® add 66 mA (15 V supply) or 41 mA (24 V supply)
DeviceNet™ add 48 mA (24 V supply)
Analog output/command 0...5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communication standard: RS232;
options: PROFIBUS DP, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU or ASCII, FLOW-BUS
Electrical connection
Analog/RS232 9-pin D-connector (male);
PROFIBUS DP bus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
Devicenet™ 5-pin M12-connector (male);
EtherCAT®/PROFINET 2 x RJ45 modular jack (in/out)
Modbus/FLOW-BUS RJ45 modular jack

- Mass flow units sccm and slm refer to 0°C (32°F) and 1013 mbar (14.7 psi)
- Technical specifications and dimensions subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the productpage on our website


EX-FLOW brochure

Manual EX-FLOW meters and controllers - ATEX
Manual EX-FLOW meters and controllers - IECEx
Manual EX-FLOW meters and controllers - TIIS
Manual EX-FLOW meters and controllers - KCs

Dimensional drawing
Dimensional drawing F-120MX-F-130MX

Bronkhorst High-Tech B.V.

Nijverheidsstraat 1A
NL-7261 AK Ruurlo (NL)
Tel. +31 573 45 88 00

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