FF-M0x

Mass Flow/Pressure Meters for Low Gas Flows

FLEXI-FLOW Compact models FF-M00 and FF-M01 Mass Flow / Pressure Meters are suited for accurate measurement of flow ranges between 0…5 ml_n/min and 0…200 ml_n/min at operating pressures between 0,8 and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique, internationally patented TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion.

The multi-parameter instruments are Built-to-Order (BtO) and provide the user with useful process information:
- Model FF-M00: flow + temperature
- Model FF-M01: flow + temperature + up- and downstream pressure

Spécifications techniques

Système de mesure / régulation
Gamme de débit (gammes intermédiaires disponibles)	min. 0…5 ml_n/min max. 0…200 ml_n/min (basée sur N₂)





Gammes de pression	FF-M00: pas disponible / FF-M01: 0...17 bar(a)



Précision (Linéarité incl.) (basée sur étalonnage réel)	Up to ±0,5% Rd plus ±0,1% FS (N₂/Air/O₂); for other gases add conversion uncertainty; see multi gas table;




Répétabilité	Flow sensor: < ±0,2% Rd; Pressure sensors: < ±0,2% FS
Rangeabilité	up to 1:1000; ≤ 20 mln/min: up to 1:500


Pression max. de fonctionnement	16 bar g










Multi-gaz/Multi-gammes	embedded gas data for 22 unique gases plus any mixture of these gases

Temps de réponse (capteur)	< 30 ms (T₆₃)



Stabilité à long terme	< 0,5% FS over period of 3 years; then < 0,2% FS per year





Température de fonctionnement	0 … 50 °C
Conditions de stockage / transport	-20 … +80 °C, max. 95% RH (non-condensing)

Montage	any position, attitude sensitivity negligible
Sensibilité à la température	Flow sensor: zero 0,015% FS/ºC; span 0,05% Rd/ºC; Pressure sensors: zero 0,16 mbar/ºC; span 0,05% Rd/ºC
Précision de la température	± 0,2 ºC (instrument body temperature)
Précision des capteurs de pression	±0,5% FS






Sensibilité à la pression	standard: < 0,15% Rd/bar typical N₂; with pressure correction: typical factor 5 improved



Etanchéité, vers l'extérieur	tested < 2 x 10^-9 mbar l/s He

Parties mécaniques

Corps de l'instrument	Aluminium or Stainless steel (selectable)





Matériau (pièces en contact avec le fluide)	aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass
Qualité état de surface	< 1,6 mu Ra (<0,8 mu Ra for stainless steel body)

Pression (PN)	16 bar(g) / 250 psig





Raccords de process	1/8" BSPP female thread; couplings to be ordered separately

Joints	default: FKM 51415; for other materials contact factory
Poids	250 g with Aluminium body, 350 g with SS 316 body; add 50 g for Ethernet interface
Protection IP	IP40

Propriétés électriques

Alimentation électrique	24 Vdc ± 10%


Consommation d'électrique max.	0,5 Watt; add 0,9 Watt for EtherNet communication















Communication numérique	Modbus RTU or FLOW-BUS (selectable) Optional: PROFINET, EtherCAT, Modbus-TCP, Ethernet/IP or POWERLINK







Interface de support	USB-C port for easy setup; Optional Bluetooth connection for monitoring


Raccordement électrique	9-pin D-sub (male)
Certification	CE / UKCA / KC

Raccordement électrique

Options vanne de régulation

Options actionneur externe à connecter au régulateur

Certification pour les zones à risque d'explosion

Certifications / certificats

Hook-up diagrams

Downloads

Brochures
FLEXI-FLOW Compact brochure

Manuals
Manual FLEXI-FLOW Compact
Quick Start Guide FLEXI-FLOW Compact
Mounting Instruction Compression Fittings
Mounting Instruction Push-in Fittings

Hook-up diagrams
FLEXI-FLOW Compact Modbus-RTU / FLOW-BUS
FLEXI-FLOW Compact Ethernet

Dimensional drawings
Dimensional drawing FF-M0x

Solids 3D
FLEXI-FLOW Compact FF-M0x - Modbus-RTU / FLOW-BUS
FLEXI-FLOW Compact FF-M0x - Ethernet

FLEXI-FLOW Compact FF-M0x

Mass Flow/Pressure Meters for Low Gas Flows

Spécifications techniques

Downloads

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