Vapor Flow Control

Our unique and patented 'CEM' technology, which stands for Controlled Evaporation Mixing, is developed for accurate vapor flow control. Traditional bubbler systems are often not capable of handling sufficient quantities of liquid with a low vapor pressure, or perform in an imperfect way. Moreover, they cannot instantaneously provide vapor of a mixture of liquids with different vapor pressures. These issues are overcome with our vapor delivery solutions.

Bronkhorst's evaporation technology is fast, accurate, highly repeatable and efficient.

CEM-Technology: Controlled Evaporation Mixing

The CEM-System (Controlled Evaporation and Mixing) is an innovative Liquid Delivery System (LDS) that can be applied for atmospheric or vacuum processes. The vapor generation system consists of a (thermal or Coriolis) liquid flow controller, an MFC for carrier gas and a temperature controlled mixing and evaporation device. The system is suitable for mixing liquid flows of 1-1200 g/h resulting in saturated vapor flows of 50 mln/min up to 100 ln/min. This vaporizer system can replace bubblers. New opportunities created with the CEM-system: mixtures can be evaporated and even solids, dissolved in solvents can be vaporized successfully.

Features

Accurately controlled gas/liquid mixture
Fast response
High reproduceability
Very stable vapor flow
Flexible selection of gas/liquid ratio
Lower working temperature than conventional systems
Optional control by PC/PLC (RS232/fieldbus)

Video Vapor Delivery Modules

In this video, we present our all-in-one solution for an accurately controlled vapor flow, providing fast response and high flexibility: The VDM-Series Vapor Delivery Modules.

VDM-Series: Vapor Delivery Modules

Based on the CEM-technology as described above, we designed a new series of Vapor Delivery Modules. These compact sub-systems incorporate the components of the CEM-System and more! Besides gas and liquid flow controllers and the temperature controlled evaporator, the VDM-Series feature integrated power supply with display (1.8” TFT) and control functions. As an option, the unit offers local or remote trace heating temperature control. The compact, ‘plug and work’ module can generate (saturated) vapor flows within the range of 100 ml_n/min up to 10 l_n/min. It can be applied for atmospheric or vacuum processes and is capable of evaporating mixtures and even solids, dissolved in solvents.

Additional features (compared to separate CEM system components)

No need for engineering or manufacturing
Pre-tested, safe and ready to use
Readout/Control panel, incl. 1,8” TFT display, alarm/signaling and counter functions.
Integrated fieldbus interface (option)

Vapor Control Applications

CVD (Chemical Vapor Deposition), e.g. for hardening, thin film coating or planarization processes
Testing/calibration of analyzers with reference gas vapor concentrations
Toxic gas effects on protective clothing
Analyzers with reference H2O vapor concentrations
Humidification of fuels
Anesthetics
Sorption experiments or processes in pharma or food applications

Application stories

Source: Zeton BV

Downloads

Brochures
CEM and VDM brochure: Solutions for Vapour Flow Control

Manuals
Manual CEM Controlled Evaporator and Mixer
Manual Vapor Delivery Module

Select your model

Model	Description	Max. capacity (based on water)	Max. capacity	Max. temp.
W-101A	10 W, for µ-FLOW	2 g/h Liquid	4 l_n/min Gas	200°C
W-102A	10 W, for LIQUI-FLOW™/ mini CORI-FLOW™	30 g/h Liquid	4 l_n/min Gas	200°C
W-202A	100 W, for LIQUI-FLOW™/ mini CORI-FLOW™	120 g/h Liquid	10 l_n/min Gas	200°C
W-303B	1000 W, for LIQUI-FLOW™/ mini CORI-FLOW™	1200 g/h Liquid	100 l_n/min Gas	200°C
SW-100	10 W, VDM-Series	30 g/h Liquid	4 l_n/min Gas	200°C
SW-200	100 W, VDM-Series	120 g/h Liquid	10 l_n/min Gas	200°C