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Datasheet IQFD-200C

IQ+FLOW IQFD-200C Downported MFC

Micro Fluidic Mass Flow Controller for Gases, Downported

  • Small footprint ensures space efficiency
  • Very small internal volume
  • Economical solution, low cost of ownership
  • Analog or digital communication
  • Top-mount construction; easily accessible
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IQ+FLOWIQFD-200C Downported MFC

MEMS based Mass Flow Controller for Gases, for OEM Applications

Bronkhorst® IQ+FLOW® model IQFD-200C Mass Flow Controllers (MFCs) are suited for precise control of dry, clean, non-corrosive, non-explosive gases. The ultra compact, downported MFC has a chip-based (MEMS) thermal mass flow sensor and is suited for flow ranges between 0,2…10 mln/min and 0,1…5 ln/min N2-equivalent at operating pressures between vacuum and 10 bar(g). Communication with the devices can be either in analog mode or digital over RS232 or RS485.

The ultra compact IQ+FLOW instruments are typically recommended for integration in analytical and medical equipment.

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0,2…10 mln/min
max. 0,1…5 ln/min
(based on N2)
Accuracy (incl. linearity) (based on actual calibration)< ±1,5% RD + ±0,5% FS
(Based on calibration with actual gas, at ambient temperature and at customer specified inlet pressure. Horizontal mounting position.)
Repeatabilityfor flows < 20 mln/min: < ±0.5% FS;
for flows > 20 mln/min: < ±0,5% RD
Turndown ratio1:50 (2…100%)
Operating pressure0 … 10 bar g
MediaDry, clean, non-corrosive gases. Standard calibration gases Air, N2, Ar, He, CO2 and H2. Other dry, clean, non-corrosive gases on request (O2, CO, …)
Multi fluid capabilityStorage of max. 8 calibration curves
Settling time (in control, typical)t98% down to 300 msec, 700 msec typical
Operating temperature5 … 50 °C
Temperature sensitivityspan: 0,2% RD/°C; zero: 0,01 mln/min/°C
Max. Kv-value2,37 x 10-3
Leak integrity, outboard< 1 x 10-8 mbar∙l/s He
Attitude sensitivitymax. error at 90° off horizontal 0,5 mln/min at 1 bar, typical N2
Mechanical parts
Material (wetted parts)aluminium, Si, SiOx, epoxy;
option: stainless steel body (SS316L)
Process connectionsdownported construction
Sealsstandard: Viton®; other on request
Weight120 g (Aluminium) / 180 g (SS316L)
Ingress protectionIP40
Max. differential pressure across control valve9 bar dif.
Electrical properties
Readout sample time2 msec
Power supply+ 15 … 24 Vdc
Max. power consumption100 mA
Analog output0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationRS232, RS485 (Modbus-RTU/ASCII or FLOW-BUS)
Electrical connection
Power/Analog/RS232/RS485RJ45 modular jack
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Downloads

Brochures
IQ-FLOW Brochure
Manuals
Manual IQ-FLOW
Quick installation guide
Hook-up diagrams
RS232-RS485
Dimensional drawing
Dimensional drawing IQFD-IQPD 1-channel topmount
Solids 3D
IQFD-100C-200C
Download as PDF

Bronkhorst High-Tech designs and manufactures innovative instruments and subsystems for low-flow measurement and control for use in laboratories, machinery and industry. Driven by a strong sense of sustainability and with many years of experience, we offer an extensive range of (mass) flow meters and controllers for gases and liquids, based on thermal, Coriolis and ultrasonic measuring principles. Our global sales and service network provides local support in more than 40 countries. Discover Bronkhorst®!