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Datasheet F-111CM

EL-FLOW Metal Sealed F-111CM

Metal Sealed Mass Flow Meter for Gases

  • Patented metal-to-metal seal construction ensures long-term leak tightness (to atmosphere)
  • High surface quality of wetted parts
  • Cleanroom assembled
  • High accuracy, excellent repeatability
  • Multi Gas / Multi Range functionality (option)
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EL-FLOW Metal SealedF-111CM

Metal Sealed Gas Mass Flow Meters

Bronkhorst® model F-111CM Mass Flow Meters (MFMs) designed especially to meet the requirements of the semicon market as well as other high purity gas applications. The instruments feature high surface quality and are of modular construction with metal-to-metal seals that ensure long-term leak tightness. The F-111CM is suited for precise measurement of flow ranges between 0.12…6 sccm up to 1…50 slm (based on N2) at operating pressures between vacuum and 1450 psig (100 barg).

EL-FLOW® Metal Sealed series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols. The EL-FLOW® Metal Sealed design features optional Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0,12…6 mln/min
max. 1…50 ln/min
(based on N2)
Accuracy (incl. linearity) (based on actual calibration)±0,5% Rd plus ±0,1% FS
Repeatability< 0,2 % RD
Turndown ratio1:150 (1:50 in analog mode)
Max. operating pressure1450 psig (100 barg)
Multi fluid capabilitystorage of max. 8 calibration curves;
optional Multi Gas / Multi Range functionality up to 10 bar abs
Operating temperature-10…+70 °C
Mountingany position, attitude sensitivity negligible
Temperature sensitivityzero: < 0.05% FS/°C; span: < 0.05% Rd/°C
Pressure sensitivity< 0,1% Rd/bar typical N2;
< 0,01% Rd/bar H2
Leak integrity, outboard< 2 x 10-11 Pa.m3/s He
Warm-up time30 min. for optimum accuracy
2 min for accuracy ± 2% FS
Mechanical parts
Material (wetted parts)stainless steel 316L or comparable
Process connections1/4” face seal male
SealsOuter seals: metal-to-metal (no rings);
Inner seal: Kalrez 6375
Weight0,6 kg
Ingress protectionIP40
Electrical properties
Power supply+ 15 … 24 Vdc
Max. power consumption
Supply
15 V
24 V		 at voltage I/O
95 mA
65 mA		 at current I/O
125 mA
85 mA		 extra for fieldbus
<75 mA
<50 mA
Analog output0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationstandard: RS232;
options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, FLOW-BUS
Electrical connection
Analog/RS2329-pin D-connector (male);
PROFIBUS DPbus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
CANopen® / DeviceNet™5-pin M12-connector (male);
FLOW-BUS/Modbus-RTU/ASCIIRJ45 modular jack
Modbus TCP / EtherNet/IP / POWERLINK2 x RJ45 modular jack (in/out);
EtherCAT®/ PROFINET2 x RJ45 modular jack (in/out)
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Downloads

Brochures
Metal Sealed Mass Flow and Pressure brochure
Manuals
Quick start guide EL-FLOW Metal Sealed
Manual EL-FLOW Select
Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
PROFINET
CANopen
EtherNet/IP
Modbus-TCP
Optional Bus and IO Configurations
Dimensional drawings
Dimensional drawing F-111CM
Dimensions Digital Cases
Download as PDF

Bronkhorst High-Tech designs and manufactures innovative instruments and subsystems for low-flow measurement and control for use in laboratories, machinery and industry. Driven by a strong sense of sustainability and with many years of experience, we offer an extensive range of (mass) flow meters and controllers for gases and liquids, based on thermal, Coriolis and ultrasonic measuring principles. Our global sales and service network provides local support in more than 40 countries. Discover Bronkhorst®!