Metal-Sealed Forward Pressure Controllers
Bronkhorst® model P-602CM Forward Pressure Transducers (EPCs) are designed especially to meet the requirements of the semicon market as well as other high purity gas applications. The instruments feature high surface quality and are of modular construction with metal-to-metal seals that ensure long-term leak tightness. The P-602CM is suited for precise measurement and control of pressure ranges between 5…100 mbar and 3,2…64 bar absolute or 1,05...21 bar gauge. The EPC has a well-proven compact thru-flow design and includes a diaphragm type piezo-resistive pressure sensor, a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for pressure control by means of integrated control valve.
In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols