FF-M1xD

Downported Mass Flow/Pressure Meters

FLEXI-FLOW Compact models FF-M10D and FF-M11D Downported Mass Flow / Pressure Meters are suited for accurate measurement of flow ranges between 0…500 ml_n/min and 0…20 l_n/min at operating pressures between 0,8 and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique, internationally patented TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion.

The multi-parameter instruments provide the user with useful process information:
- Model FF-M10D: flow + temperature
- Model FF-M11D: flow + temperature + up- and downstream pressure

Technische Spezifikationen

Mess- / Regelsystem
Durchflussbereich (Zwischenbereiche verfügbar)	min. 0…500 ml_n/min max. 0…20 l_n/min (basierend auf N₂)





Druckbereiche	FF-M10D: nicht verfügbar / FF-M11D: 0...17 bar(a)



Genauigkeit (inkl. Linearität) (basierend auf der aktuellen Kalibrierung)	Up to ±0,5% Rd plus ±0,1% FS (N₂/Air/O₂); for other gases add conversion uncertainty; see multi gas table;




Wiederholgenauigkeit	Flow sensor: < ±0,2% Rd; Pressure sensors: < ±0,2% FS
Turndown-Bereich	up to 1:1000


max. Betriebsdruck	16 bar g










Multi Gas/Multi Range	embedded gas data for 22 unique gases plus any mixture of these gases

Ansprechzeit (Sensor)	< 30 ms (T₆₃)



Langzeitstabilität	< 0,5% FS over period of 3 years; then < 0,2% FS per year





Betriebstemperatur	0 … 50 °C
Lager-/Transportbedingungen	-20 … +80 °C, max. 95% RH (non-condensing)

Einbau	any position, attitude sensitivity negligible
Temperatursensibilität	Flow sensor: zero 0,015% FS/ºC; span 0,05% Rd/ºC; Pressure sensors: zero 0,16 mbar/ºC; span 0,05% Rd/ºC
Temperatur-Genauigkeit	± 0,2 ºC (instrument body temperature)
Genauigkeit Drucksensoren	±0,5% v.E.






Druckempfindlichkeit	standard: < 0,15% Rd/bar typical N₂; with pressure correction: typical factor 5 improved



Leckdichtigkeit, nach außen	tested < 2 x 10^-9 mbar l/s He

Mechanische Teile

Instrumentenkörper	Aluminium or Stainless steel (selectable)





Werkstoff (medienberührte Teile)	aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass
Oberflächenqualität	< 1,6 mu Ra (<0,8 mu Ra for stainless steel body)

Druckstufe (PN)	16 bar(g) / 250 psig





Prozessanschlüsse	downported construction

Dichtungen	default: FKM 51415; for other materials contact factory
Gewicht	275 g with Aluminium body, 375 g with SS 316 body; add 50 g for Ethernet interface
Schutzart (Gehäuse)	IP40

Elektrische Eigenschaften

Spannungsversorgung	24 Vdc ± 10%


Stromaufnahme max.	0,5 Watt; add 0,9 Watt for EtherNet communication















Digitale Kommunikation	Modbus RTU or FLOW-BUS (selectable); Optional: PROFINET, EtherCAT, Modbus-TCP, Ethernet/IP or POWERLINK







Support-Schnittstelle	USB-C port for easy setup; Optional Bluetooth connection for monitoring


Elektrische Anschlüsse	9-pin D-sub (male)
Zertifikation	CE / UKCA / KC

Elektrische Anschlüsse

Optionen Regelventil

Externe Antriebsmöglichkeiten zum Anschluss an das Instrument

Zertifizierung für explosionsgefährdete Bereiche

Zulassungen / Zertifikate

Hook-up diagrams

Downloads

Brochures
FLEXI-FLOW Compact brochure

Manuals
Manual FLEXI-FLOW Compact
Quick Start Guide FLEXI-FLOW Compact

Hook-up diagrams
FLEXI-FLOW Compact Modbus-RTU / FLOW-BUS
FLEXI-FLOW Compact Ethernet

Dimensional drawings
Dimensional drawing FF-M1xD

Solids 3D
FLEXI-FLOW Compact Downported MFC-MFM

FLEXI-FLOW Compact FF-M1xD

Downported Mass Flow/Pressure Meters

Technische Spezifikationen

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